MEMS

Date & Location

City: Burlington, MA
Time: 9:00am - 5:00pm
Date: August 15, 2014
Location: COMSOL, Inc.
1 New England Executive Park, Suite 350
Burlington, MA 01803
Directions

Introduction

This course provides an introduction to the MEMS Module, an add-on module to COMSOL Multiphysics. You will learn how to build models for a range of MEMS devices including electrostatically actuated resonators, accelerometers, piezoelectric devices and thermal actuators. This course also covers coupling physics phenomena related to Mechanical, Electrical, Thermal and Fluid effects required for modeling a MEMS device. Important concepts in MEMS devices such as Damping, Frequency response analysis and modeling Electromechanical forces will be discussed.

Content Overview

This course covers the modeling of Microelectromechanical Systems (MEMS) using the built-in physics interfaces of COMSOL Multiphysics. This course addresses the following areas of physics:
  • Structural Mechanics: small strain linear elastic, geometric nonlinear, frequency response, eigenvalue, and biased analyses.
  • Structural Damping: Thin Film Damping, Rayleigh Damping, etc.
  • Electromechanics: The coupling of electrostatics and Solid Mechanics to
    compute the deformation of electrostatically actuated structures.
  • Piezoelectric Devices: Devices that deform structurally under an applied
    electric field. Linear and frequency response analyses.
  • Joule Heating and Thermal Expansion

    Suggested Background

    This course assumes some familiarity with the basics of Microelectromechanical Systems. We strongly recommend that those new to COMSOL Multiphysics take the COMSOL Multiphysics Intensive Training course prior to attending this class.

    Course Hours

    The hours for all COMSOL courses are from 9:00am to 5:00pm; please plan to check in between 8:30am and 9:00am. Lunch and refreshments during the morning and afternoon breaks are included.

    Pricing & Payment Methods

    The price for this one-day course is $695.00 per person. Academic discounts are available upon request. A discounted group rate of $1,695 is offered for three attendees from the same institution registering for this course. This discount may not be combined with any other offer.

    We accept payment by Visa, MasterCard, company purchase order, check, wire or direct deposit. For security purposes please do not send credit card information via email. COMSOL will contact you by phone to confirm the payment information.

    Please mail payments/purchase orders to:

    COMSOL, Inc.
    1 New England Executive Park, Suite 350
    Burlington, MA 01803

    Please fax purchase orders to:

    COMSOL, Inc.
    ATTN: Training
    781-273-6603

    Course Payment and Cancellation Policy

    Please read about our cancellation/return policies.

    For registration and more information, e-mail course@comsol.com, or call 781-273-3322.

    Registration


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