Modell Galerie

Die Modell Galerie umfasst COMSOL Multiphysics Modelldateien aus einer Vielzahl von Anwendungsbereichen, die von Mechanik und Elektronik über Strömungen bis zur Chemie reichen. Sie können fertige Modelle herunterladen sowie Schritt-für-Schritt-Anleitungen, mit denen Sie die Modelle nachbauen können, und verwenden Sie die Modelle als Ausgangspunkt für Ihre eigenen Anwendungen. Nutzen Sie die Quick Search, um die für Ihren Fachbereich relevanten Modelle zu finden. Um die Dateien herunterzuladen, loggen Sie sich ein oder erzeugen Sie einen COMSOL Access Account, der mit einer gültigen COMSOL Lizenz assoziiert ist.

In-Plane Microwave Plasma

Wave heated discharges may be very simple, where a plane wave is guided into a reactor using a waveguide, or very complicated as in the case with ECR (electron cyclotron resonance) reactors. In this example, a wave is launched into reactor and an Argon plasma is created. The wave is partially absorbed and reflected by the plasma which sustains the plasma.

Oxygen Boltzmann Analysis

The Boltzmann equation can be solved to validate sets of electron impact collision cross sections. In fact, sets of collision cross sections are traditionally inferred by solving a two-term approximation to the Boltzmann equation and comparing the results to swarm experiments. This model solves a two-term approximation to the Boltzmann equation and compares the computed drift velocity and ...

GEC ICP Reactor, Argon Chemistry

The GEC cell was introduced by NIST in order to provide a standardized platform for experimental and modeling studies of discharges in different laboratories. The plasma is sustained via inductive heating. The Reference Cell operates as an inductively-coupled plasma in this model. This model investigates the electrical characteristics of the GEC reference cell for argon chemistry.

3D Model of an ICP Reactor with Argon Chemistry

3D plasma modeling is possible to do in COMSOL. A square coil is placed on top of a dielectric window and is electrically excited at 13.56MHz. A plasma is formed in the chamber beneath the dielectric window, which contains Argon gas at low pressure (20 mtorr). The gas flows into the process chamber from two 2 inch ports and the gas is extracted through a single 4 inch port. The plasma is ...

Computing the Ion Energy Distribution Function

One of the most useful quantites of interest after solving a self-consistent plasma model is the ion energy distribution function (IEDF). The magnitude and shape of the IEDF depends on many of the discharge parameters; pressure, plasma potential, sheath width etc. At very low pressures the plasma sheath is said to be collisionless, meaning that the ion energy is not retarded by collisions with ...

Harmonic Content of the Power Deposition into a Dual Frequency Capacitively Coupled Plasma

Energy transfer from the time varying electrostatic field to electrons in a capacitively coupled plasmas (CCP) does not exclusively occur at twice the RF frequency. Due to the highly nonlinear mechanism of power transfer from the fields to the electrons, power deposition occurs at frequencies higher than twice the driving frequency. For dual frequency CCP reactors the harmonic content of the ...

Argon Boltzmann Analysis

The electron energy distribution function (EEDF) plays an important role in the overall behavior of discharges. Analytic forms of the EEDF exist such as Maxwellian or Druyvesteyn, but in some cases they fail to fit the discharge physics. This tutorial model investigates the effects of various parameters on the electron energy distribution function and rate coefficients for an argon discharge. ...

GEC CCP Reactor, Argon Chemistry, 1D

The NIST GEC CCP reactor provides a platform for studying capacitively coupled plasmas. Even the simplest plasma models are quite involved so a 1D example helps in understanding the physics without excessive CPU time. The problem has no steady-state solution, although a periodic steady-state solution is reached after a suitable number of RF cycles (usually >1000).

Plasma Display Panel

This model illustrates the physics of a dielectric barrier discharge which leads to generation of UV light. Such a discharge is used to generate the back light for plasma display panels.

TM Mode Microwave Plasma

This model shows how to simulate a TM mode microwave plasma by using the Doppler broadening parameter to smooth out the resonance zone, which occurs on the contour of critical electron density. A detailed explanation of the underlying physics of this model can be found in the blog entry "Application Note on Microwave Discharges".

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