Xylophone Bar Magnetometry and Inertial-grade MEMS Optimisation: a Multiphysics Approach

H. T. D. Grigg, and B. J. Gallacher
Microsystems Group
Newcastle University
Newcastle upon Tyne
Tyne and Wear, UK
Veröffentlicht in 2011

This paper presents ongoing research aimed at development of a MEMS magnetometer capable of nanoTesla sensitivity. Such a device would pave the way for inertial-grade MEMS IMUs. A resonant sensor is proposed, based on a Xylophone Bar sense element, and is analysed both directly and via COMSOL.

Mode shapes and frequencies are found as functions of geometric parameters, and the results used with a PML support loss analysis to derive an estimate for the device Q. A Joule Heating analysis is coupled to the Structural Mechanics problem, and the variation of the modes and Q factors is examined. The results give optimality conditions on the resonator design, and show that with suitable control, nT sensitivity is accessible.

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