d_wafer 100[mm] "Wafer diameter" t_wafer 0.5[mm] "Wafer thickness" r_electrode 45[mm] "Electrode radius" t_insulator 0.6[mm] "Insulator thickness" gap 40[um] "Gap between wafer and chuck" d_pin 1[mm] "Pin width" x_pin 49[mm] "Pin location" d_inlet 4[mm] "Inlet diameter" w_outlet 2[mm] "Outlet width" x_outlet 30[mm] "Outlet location" L_inlet 1[mm] "Inlet length" L_outlet 1[mm] "Outlet Length" x_gap3 48[mm] "gap_3 location" w_gap3 0.25[mm] "gap_3 width"