mass_He 0.004[kg/mol] "Molar mass of helium"
Q_plasma 0[W/m^2] "Plasma heat flux"
flow 0[1] "Mass flow in SCCM"
zsp 1[um] "Z-coordinate of setpoint"
T_chuck 273[K] "Chuck temperature"
T_wafer_init 273[K] "Initial wafer temperature"
v_app 0[V] "Applied voltage"
v_inlet 0[m/s] "Velocity at inlet"
t_start 1[s] "Pulse start time"
t_pulse 4[s] "Pulse duration"