Pin 500[W] "Input power"
p0 25[kPa] Pressure
Qs 400 "Mass flow"
f0 2.45[GHz] "Excitation frequency"
R0 11.4[cm] "Chamber radius"
H0 38.7[cm] "Chamber height"
Slw 1.[cm] "Substrate lift width"
Slh 12.2[cm] "Substrate lift height"
Shw 2.5[cm] "Substrate holder width"
Shh 2[cm] "Substrate holder height"
Bhw R0-Br "Bell jar holder width"
Bhh 3[cm] "Bell jar holder height"
Br 7.3[cm] "Bell jar radius"
Bz 12.8[cm] "Bell jar heigh"
Bth 0.7[cm] "Bell jar thickness"
Cxw 3[cm] "External coaxial width"
Cxh 15[cm] "External coaxial height"
Th 4[cm] "Transition height"
Tw Th "Transition width"
Cxiw 0.5[cm] "Inner coax width"
Cxos 0.5[cm] "Inner coax offset"
Dw 6[cm] "Diamond side"
Dcut 1.2[cm] "Diamond Cut"
dielh 6.5[cm] "Dielectric height"
dielw 1.7[cm] "Dielectric width"