GEC CCP Reactor, Argon Chemistry, 1D

Application ID: 8646

The NIST GEC CCP reactor provides a platform for studying capacitively coupled plasmas. Even the simplest plasma models are quite involved so a 1D example helps in understanding the physics without excessive CPU time.

The problem has no steady-state solution, although a periodic steady-state solution is reached after a suitable number of RF cycles (usually >1000).

This model example illustrates applications of this type that would nominally be built using the following products:

Plasma Module