Robust Design and Optimization of Thick Film Accelerometers in COMSOL Multiphysics with OptiY

H. Neubert1, A. Kamusella1, and T. Q. Pham2
1Institute of Electromechanical and Electronic Design, Technische Universität Dresden, Dresden, Germany
2OptiY e.K., Aschaffenburg, Germany

The optimization of design parameters with regard to tolerances is an important reason for design processing. We used a COMSOL Multiphysics structural mechanics model with the OptiY tool for finding an optimized design of a thick film accelerometer conforming to our sensitivity and cross sensitivity requirements, including resonance frequency.

We calculated the probability of a system failure due to relevant tolerances of the design parameters obtained from a sensitivity analysis.

In the final step, we will be able to calculate a robust design of the ceramic thick film accelerometer.