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how to simulate ion implantation

Posted 13.07.2012, 14:01 GMT-4 Modeling Tools & Definitions, Parameters, Variables, & Functions Version 4.2a 0 Replies

Haibo Liu
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I want to simulate H+ ion implantation into material and analyze the diffusion of the implanted ion within material, how to setup the implanted ion energy?
0 Replies Last Post 13.07.2012, 14:01 GMT-4
COMSOL Moderator

Hello Haibo Liu

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