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Particle tracking and Plasma

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My calculation model is ICP model under rf bias, including particle tracking module. Charged particles are released at intervals of 30 times in one rf cycle. After studying the calculation of a pair of global models, how to inherit the solution of study 1 in the calculation of two pairs of particle tracking modules, how to inherit the change of a complete RF cycle?


0 Replies Last Post 05.06.2022, 23:34 GMT-4
COMSOL Moderator

Hello 展鹏 种

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