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## Impedance Calculation in Surface Acoustic Wave Simulation

Posted 21.02.2024, 12:24 GMT-5 MEMS & Piezoelectric Devices Version 6.1 3 Replies

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Hello,

I am using a simulation for Surface Acoustic Waves in the frequency domain in order to obtain impedance. Initially, I am employing two boundary probes, one to measure electric potential and the other to measure the norm of surface current density multiplied by the out-of-plane thickness. Then, in the results section for the 1D plot group, it was chosen to use the point graph where I calculate the impedance ratio (V/A) through both probes. The issue is that I am not obtaining satisfactory results. Am I approaching this incorrectly?

In the physics I am applying, a terminal is used as a source of AC voltage. I have a question regarding this. In the time domain study, I made a global definition (analytical) as a cosine wave dependent on time, but in the frequency domain study, this is not possible. Therefore, I decided to define a waveform (global definition), but I am uncertain if it is correct for obtaining impedance. What should I do instead of using this waveform?

Could someone help me with this problem?

Thank you, Regards, TM