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Electrostatically Actuated Cantilever

The elastic cantilever beam is one of the elementary structures used in MEMS designs. This model shows the bending of a cantilever beam under an applied electrostatic load. The model solves the deformation of the beam under an applied voltage.

Pressure Sensor Moisture Absorption

For their integration in microelectronic circuits, MEMS devices are bonded on printed circuit boards and connected with other devices. Then, the whole circuit is often covered with an epoxy mold compound (EMC) to protect the devices and their interconnects with the board. The epoxy polymers used for such applications are subject to moisture absorption and hygroscopic swelling, which can lead to ...

Composite Piezoelectric Transducer

This example shows how to set up a piezoelectric transducer problem following the work of Y. Kagawa and T. Yamabuchi. The composite piezoelectric ultrasonic transducer has a cylindrical geometry that consists of a piezoceramic layer, two aluminum layers, and two adhesive layers. The system applies an AC potential on the electrode surfaces of both sides of the piezoceramic layer. The goal is ...

Pull-in of an RF MEMS Switch

This model analyzes an RF MEMS switch consisting of a thin micromechanical bridge suspended over a dielectric layer. A DC voltage greater than the pull-in voltage is applied across the switch, causing the bridge to collapse onto the dielectric layer with a resulting increase in the capacitance of the device. A penalty based contact force is implemented to model the contact forces as the bridge ...

Microresistor Beam

Microresistors allow for quick and accurate actuation or structural movement directly related to the electricity that is applied to them. Microresistors can be used in many applications where small perturbations or deflections are required to be applied to devices, almost instantaneously. The Microresistor Beam app illustrates the importance of fully coupled, multiphysics simulations. An ...

Piezoresistive Pressure Sensor, Shell

Piezoresistive pressure sensors were some of the first MEMS devices to be commercialized. Compared to capacitive pressure sensors, they are simpler to integrate with electronics, their response is more linear and they are inherently shielded from RF noise. They do, however, usually require more power during operation and the fundamental noise limits of the sensor are higher than their capacitive ...

External Material Examples, Structural Mechanics

A new way to specify user-defined material models is included in COMSOL Multiphysics version 5.2. For structural mechanics, you have the possibility to either completely define the material model in a domain, or to add an inelastic strain contribution to an elastic material. The external material functions are coded in C, and compiled into a shared library. By programming a wrapper function in ...

Piezoelectric Energy Harvester

This model shows how to analyze a simple, cantilever based, piezoelectric energy harvester. A sinusoidal acceleration is applied to the energy harvester and the output power is evaluated as a function of frequency, load impedance and acceleration magnitude.

Surface Micromachined Accelerometer

This model shows how to simulate a capacitively actuated surface micromachined accelerometer, using the Electromechanics Interface. It is based on a case study from the book Microsystem Design by Stephen D. Senturia (Kluwer Academic Publishers, 5th Edition, 2003, pages 513-525).

Micropump Mechanism

Micropumps are key components of microfluidic systems with applications ranging from biological fluid handling to microelectronic cooling. This model simulates the mechanism of a valveless micropump, that is designed to be effective at low Reynolds numbers, overcoming hydrodynamic reversibility. Valveless pumps are often preferred in microfludic systems because they minimize the risk of ...