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Residual Stress in a Thin Film Resonator - 3D

Surface micromachined thin films are often subject to residual stress. This COMSOL Multiphysics example describes a thin film resonator with straight or folded cantilever beam springs. The resonance frequencies of the resonator are affected by thermal stress. Using folded springs relieves this effect. The example is made up of four models: two thin film resonators with folded cantilever beam ...

Microresistor Beam

This example illustrates the ability to couple thermal, electrical, and structural analysis in one model. This particular application moves a beam by passing a current through it; the current generates heat, and the temperature increase leads to displacement through thermal expansion. The model estimates how much current and increase in temperature are necessary to displace the beam. Although ...

Piezoelectric Microgripper

This tutorial models a piezoelectrically actuated microgripper with mechanical contact. The microgripper contains a piezoelectric actuator that operates in the longitudinal mode. Elongation in the longitudinal direction creates a lifting movement to the structure. Simultaneous contraction in the transversal direction closes the gripper and allows it to move objects. The model uses the ...

Thermoelastic Damping in a MEMS Resonator

Thermoelastic damping, which arises when you subject a material to cyclic stress, is an important factor when designing MEMS resonators. The stress brings about deformation, where materials heat under compressive stress and cool under tensile stress. Thus, due to the resulting heat flux, energy is lost to bring about this damping. The magnitude of the energy loss depends on the vibrational ...

Thermal Expansion in a MEMS Device

This model analyzes the thermal expansion in a MEMS device, such as a microgyroscope, where thermal expansion should be minimized. The device is made from the copper-beryllium alloy UNS C17500 and uses temperature-dependent material properties from the Material Library. The purpose of this model is to exemplify the use of the Material Library in COMSOL Multiphysics. This library contains more ...

Capacitive Micromotor

This tutorial shows how to model a 2D capacitive micromotor. The motor consists of a rotor and a stator made of polysilicon. The cogs of the stator are subjected to a time-varying pulsed voltage such that the voltage on adjacent cogs vary by a phase difference of 2p/3. As a result, a time-varying torque acts on the rotor thereby rotating it about its center. This model shows how to use an ...

Prestressed Micromirror

One method of creating spring-like structures or inducing curvature in thin structures is to plate them to substrates that are under the influence of residual stresses. The plating process can control this stress even for similar materials. One such device is the electrostatically controlled micromirror. It is typically quite small, and arrays of such devices can be implemented in projectors. ...

Piezoceramic Tube

This example involves a static 2D axisymmetric analysis of a piezoelectric actuator using the Piezoelectric Devices physics interface. It models a radially polarized piezoelectric tube, as described by S. Peelamedu and co-authors. An application area where radially polarized tubes are employed is in nozzles for fluid control in inkjet printers.

Pull-in Voltage for a Biased Resonator-2D

Silicon micromechanical resonators have long been used for designing sensors and are now becoming increasingly important as oscillators in the consumer electronics market. In this series of models, a surface micromachined MEMS resonator, designed as part of a micromechanical filter, is analyzed in detail. The Stationary Analysis of a Biased Resonator model performs a stationary analysis of ...

Squeeze-Film Gas Damping of a Vibrating Disc

This benchmark model computes the total force acting on a vibrating disc in the frequency and time domains and compares both results with expressions derived analytically. When the vibration amplitude is small enough that the system is linear the frequency and time domain results agree well with theory. Larger amplitude vibrations, which result in a non-linear response that cannot be modeled in ...