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Drift Diffusion Tutorial

The Drift Diffusion interface solves a pair of reaction/advection/diffusion equations, one for the electron density and the other for the mean electron energy. This tutorial example computes the electron number density and mean electron energy in a drift tube. Electrons are released due to thermionic emission on the left boundary with an assumed mean electron energy. The electrons are then ...

Inductively Coupled Plasma (ICP) torch

This model investigates the electrical and thermal characteristics of an inductively coupled plasma torch at atmospheric pressure. The discharge is assumed to be in local thermodynamic equilibrium.

Dipolar Microwave Plasma Source

This model presents a 2D axisymmetric dipolar microwave plasma source sustained through resonant heating of the electrons. This is known as electron cyclotron resonance (ECR), which occurs when a suitable high magnetic flux density is present along with the microwaves. This is an advanced model that showcases many of the features that make COMSOL unique, including: Infinite elements for the ...

Capacitively Coupled Plasma

The NIST Gaseous Electronics Conference has provided a platform for studying Capacitively Coupled Plasma (CCP) reactors, which is what this application is based upon. The operating principle of a capacitively coupled plasma is different when compared to the inductive case. In a CCP reactor, the plasma is sustained by applying a sinusoidal electrostatic potential across a small gap filled with a ...

Boltzmann DC Glow Discharge

This application models a DC glow discharge. The electron energy distribution function (EEDF) and electron transport properties are computed with the *Boltzmann Equation, Two-Term Approximation* interface. Since input parameters for the *Boltzmann Equation, Two-Term Approximation* interface, like the ionization degree of the plasma, are not known *a priori*, an iterative process is performed. A ...

Applying a Current-Voltage Switch to Models

This example exemplifies how to model the switching between current and voltage excitations in *Terminal* boundary conditions. A more detailed description of the phenomenon and the modeling process can be seen in the blog post "[Control Current and Voltage Sources with the AC/DC Module](https://www.comsol.com/blogs/control-current-and-voltage-sources-with-the-acdc-module/)".

Microwave Microplasma

Plasmas sustained in microscale discharge gaps are able to operate at high pressure (1 atm) with high electron number density (10{:sup}20{:/sup} m{:sup}-3{:/sup}) and power density (10{:sup}9{:/sup} W.m{:sup}-3{:/sup}) while maintaining a relatively cool heavy-particle temperature. This model simulates an atmospheric pressure argon plasma sustained by a time-varying electric excitation in the ...

Ion Energy Distribution Function

One of the most useful quantites of interest after solving a self-consistent plasma model is the ion energy distribution function (IEDF). The magnitude and shape of the IEDF depends on many of the discharge parameters; pressure, plasma potential, sheath width etc. At very low pressures the plasma sheath is said to be collisionless, meaning that the ion energy is not retarded by collisions with ...

GEC CCP Reactor, Argon Chemistry, 1D

The NIST GEC CCP reactor provides a platform for studying capacitively coupled plasmas. Even the simplest plasma models are quite involved so a 1D example helps in understanding the physics without excessive CPU time. The problem has no steady-state solution, although a periodic steady-state solution is reached after a suitable number of RF cycles (usually >1000).

Negative Streamer in Nitrogen

Streamers are transient filamentary electric discharges that can develop in a nonconducting background in the presence of an intense electric field. These discharges can attain high electron number density and consequently a high concentration of chemical active species that are relevant for numerous applications. Industrial applications include ozone production, pollution control, and surface ...