Development of a Micro Ultrasonic Transducer

F. F. Dall'Agnol[1], A. C. F. de Mattos[1]
[1]Center for Information Technology Renato Archer (CTI), Campinas, SP, Brazil
Veröffentlicht in 2014

We simulate a Capacitive Micromachined Ultrasound Transducer (CMUT) using COMSOL Multiphysics® software. The CMUT is an electromechanical system, therefore, we couple the physics of electrical and structural mechanics to describe its dynamics. We obtain the distributions of the electric field and the stress as a function of time. Finally, we derived the time evolution of the device for several frequencies, from where we obtain the maximum frequency of operation.