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FSI Analysis of Microcantilevers Vibrating in Fluid Environment

A. Ricci[1] and E. Giuri[1]

[1]Materials and Microsystems Laboratory (CHI-Lab), Politecnico di Torino, Torino, Italy

Cantilever vibration in fluid environment is probably one of the most common Fluid Structure Interaction problems in the field of Micro/Nano Electro Mechanical Systems. Usually the effect of fluid on cantilever oscillation is characterized in terms of mode resonance frequencies and quality factors (Qs). In this work a new approach to the above FSI problem is proposed: modes Q factors and resonance frequencies in a viscous fluid environment are calculated through an eigenfrequency analysis thus avoiding time domain simulation as in all the previous works about a computational approach to the current problem.