Study of Capacitance in Electrostatic Comb-Drive Actuators

P. Hanasi [1], B. G. Sheeparamatti [1], V. Abbigeri [1], N. Meti [1],
[1] Visvesvaraya Technological University, Belagavi, Karnataka, India

Capacitor is mainly defined as two conducting plates that can hold the opposite charges on it. These plates can be used either as a sensor or an actuator. If the relative distance between the two conductors changes as result of given input, then capacitance values will change. This results in basic of capacitive or electrostatic sensing configuration. On the other hand, if a voltage or the electric field were given across the two conducting plates as the input, an electrostatic force would develop between these two plates. This is defined as the electrostatic actuation.