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Modeling of Silicon Piezoresistive Pressure Sensor: Application to Prevent Some Diabetes Complications

F. Kerrour[1], A. Beddiaf[1], M. Benabbas-Marir[1]
[1]MODerNa Laboratory, University Mentouri, Constantine, Algeria

Several analytical solutions describing the mechanical behavior of a silicon micro membrane deflection, perfectly embedded and subjected to a uniform and constant pressure have been proposed. The obtained results are compared with those obtained by using COMSOL software for a rectangular diaphragm deflection. COMSOL Multiphysics is powerful software for solving problems based on partial ...

COMSOL Computational Fluid Dynamics for Microreactors Used in Volatile Organic Compounds Catalytic Elimination

M. Olea[1], S. Odiba[1], S. Hodgson[1], A. Adgar[1]
[1]School of Science and Engineering, Teesside University, Middlesbrough, United Kingdom

Volatile organic compounds (VOCs) are organic chemicals that will evaporate easily into the air at room temperature and contribute majorly to the formation of photochemical ozone. They are emitted as gases from certain solids and liquids in to the atmosphere and affect indoor and outdoor air quality. They includes acetone, benzene, ethylene glycol, formaldehyde, methylene chloride, ...

Design and Analysis of MEMS Gyroscope

L. Sujatha[1], B. Preethi[1]
[1]Rajalakshmi Engineering College, Chennai, India

MEMS gyroscope technology provides cost- effective method for improving directional estimation and overall accuracy in the navigation systems. This paper presents a tuning- fork gyroscope (TFG) [1] with a perforated proof mass. The perforated proof mass used in the design enables the reduction of the damping effect. This MEMS based gyroscope was designed using COMSOL Multiphysics 4.2a. This ...

Shape, Convection and Convergence

R. Pryor
Pryor Knowledge Systems, Inc., Bloomfield Hills, MI, USA

COMSOL Multiphysics software, when properly configured, can readily solve modeling problems in the laminar flow regime using the standard Navier-Stokes equations or in the fully turbulent flow regime using the kappa-epsilon model. Failure to solve a particular model is typically manifested by instability in the calculation and a failure of the model to converge. This paper presents a new ...

Sensitivity Analysis of Different Models of Piezoresistive Micro Pressure Sensors

S. Meenatchisundaram[1], S. M. Kulkarni[2], S. Bhat
[1]Department of Instrumentation and Control Engineering, Manipal Institute of Technology, Manipal, Karnataka, India.
[2]Department of Mechanical Engineering, National Institute of Technology, Surathkal, Karnataka, India.

Piezoresistive pressure sensors have received much attention over the years because of low cost, simple measurement techniques, etc. There is a challenge in design with respect to appropriate positioning, shape and temperature compensation. Different models of piezoresistive pressure sensors are proposed to enhance its sensitivity in terms of output voltage. This paper aims in sensitivity ...

Viscous damping of a periodic perforated MEMS microstructure when the Reynolds’ equation cannot be applied: Numerical simulations

D. Homentcovschi[1], and R.N. Miles[1]
[1]Department of Mechanical Engineering, SUNY Binghamton, NY

This paper develops a computational model for determining the total damping coefficient for a unit cell of a MEMS microscale device containing a repetitive pattern of holes. The basic cell of the microstructure is approximated by an axi-symmetric domain and the velocity and pressure fields are determined from solutions of the Navier-Stokes equations using the finite element software package ...

Magnetic Ratchet

A. Auge, F. Wittbracht, A. Weddemann, and A. Hütten
Department of Physics, University of Bielefeld, Germany

Transport phenomena in spatially periodic magnetic systems, in particular the directed transport of magnetic beads in a so called magnetic ratchet (Brownian motor) are considered. Simulations are carried out to test and optimize this system, where the Smoluchowski equation with flux terms for the magnetic and gravitational force is used. Furthermore, experiments are carried out to verify the ...

Design of a MEMS Capacitive Comb-drive Accelerometer

T. Kaya[1], B. Shiari[2], K. Petsch[1], and D. Yates[2]
[1]Central Michigan University, School of Engineering and Technology, Mount Pleasant, MI
[2]University of Michigan, Dept. of Electrical Engineering and Computer Science, Ann Arbor, MI

In this work, a MEMS low-g accelerometer with three sensitive directions is designed for health monitoring applications. The accelerometer may have different sensitivity in different axes. The proof-mass of the device is suspended by four serpentine springs, and the comb drive structure is used to form the differential capacitor to measure the displacement of the proof-mass. The structure has an ...

Optimizing the Performance of MEMS Electrostatic Comb-Drive Actuator with different Flexure Springs

S. Gupta[1], T. Pahwa[1], R. Bansal[1], V. Bansal[1], B. Prasad[1], D. Kumar[1]
[1]Electronic Science Department Kurukshetra University, Kurukshetra, Haryana

A new design of electrostatic comb drive actuator is presented in this paper by using different spring designs and with different folded beam lengths. An increased displacement of lateral comb drive actuator will subsequently be accomplished with the same actuation voltage. Stress distribution over different spring designs are simulated by COMSOL 3.5a using a standard comb drive with 4 movable ...

Micro Cooling of SQUID Sensor

B. Ottosson[1], Y. Jouahri[2], C. Rusu[1], and P. Enoksson[2]
[1]Imego AB, Gothenburg, Sweden
[2]Chalmers University of Technology, Gothenburg, Sweden

The objective of this work has been to realize a feasibility study of a cooling device for a SQUID sensor using liquid nitrogen flowing through micro channels. The design consists of an epoxy cylindrical vacuum vessel skewed by a silicon microchannel heat sink. The SQUID sensor is situated directly on top of the microchannel heat sink. The device is used at room temperature and should be able to ...