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Degeneracy Breaking, Modal Symmetry and MEMS Biosensors

H.T.D. Grigg[1], T.H. Hanley[1], B.J. Gallacher[1]
[1]Newcastle University, Newcastle upon Tyne, United Kingdom

This work is concerned with systems possessing cyclic symmetries. In particular, we concentrate on the case in which the medium possesses infinite order cyclic symmetry, while the constitutive relations have cyclic symmetry of a lower order. We investigate the interactions between modes with cyclic symmetry of order n and geometries with underlying cyclic symmetry of order M. Rayleigh's ...

Design of a MEMS Capacitive Comb-drive Accelerometer

T. Kaya[1], B. Shiari[2], K. Petsch[1], and D. Yates[2]
[1]Central Michigan University, School of Engineering and Technology, Mount Pleasant, MI
[2]University of Michigan, Dept. of Electrical Engineering and Computer Science, Ann Arbor, MI

In this work, a MEMS low-g accelerometer with three sensitive directions is designed for health monitoring applications. The accelerometer may have different sensitivity in different axes. The proof-mass of the device is suspended by four serpentine springs, and the comb drive structure is used to form the differential capacitor to measure the displacement of the proof-mass. The structure has an ...

Modeling and Analysis of Thermal Bimorph using COMSOL Multiphysics®

Rachita Shettar[1], Dr. B G. Sheparamatti[1]
[1]Basaveshwar Engineering College, Bagalkot, Karanataka, India

In this paper modeling and simulation results of a thermal bimorph is capable of producing increased displacement for increasing temperatures are presented. Thermal bimorphs are popular actuation technology in MEMS (Micro-Electro-Mechanical Systems). Bimorph actuators consist of two materials with different coefficients of thermal expansion. The main objective of this work is to investigate the ...

Design and Analysis of a Wetting Lens for the Pinhole Cameras of a Two Phase Flow System

A. K. Reddy[1], T. Satyanarayana[1]
[1]Lakireddy Balireddy Autonomous College of Engineering, Mylavaram, A.P., India

The present work reports the fabrication process of micro lens for pinhole cameras, modeled using COMSOL Multiphysics®, by satisfying the wetting properties. Wetting is a change in contact angle between the liquid and solid surface area. The wetting properties are clearly understood in terms of forces. The two immiscible fluids were taken for the formation of fluid-fluid and wall-fluid ...

MEMS Resonator for RF Applications

V. Harshey
Visvesvaraya National Institute of Technology
Maharashtra, India

Vibrating mechanical tank components, such as quartz crystals and surface acoustic wave (SAW) resonators with Q’s in the range of 10e3–10e6, are widely used to implement high-Q oscillators and band pass filters in the radio frequency (RF) and intermediate frequency (IF) stages of communication transceivers. This paper will discuss designing of resonator and effects of various parameter on the ...

Parametric Study of Polyimide - Lead Zirconate Titanate Thin Film Cantilevers for Transducer Applications

A. Arevalo[1], I.G. Foulds[1]
[1]King Abdullah University of Science and Technology, Thuwal, Kingdom of Saudi Arabia

The simulation of the piezoelectric actuation of the micro-cantilever is presented. Lead Zirconate Titanate (PZT) was chosen for the device fabrication design, due to its thin film processing flexibility. Four layers compose the cantilever structures presented in this work: PZT (piezoelectric material), Platinum (electrodes) and Zirconium Oxide as the buffer layer for the PZT film and polyimide ...

Calculation of Surface Acoustic Waves on a Piezoelectric Substrate using Amazon™ Cloud Computing

U. Vogel [1], M. Spindler [1], S. Wege [1], T. Gemming [1]
[1] Leibniz Institute for Solid State and Materials, Dresden, Germany

In this work, we seek to simulate SAWs for a better understanding and to benchmark the currently available cloud computing possibilities of COMSOL Multiphysics® software. By using the MEMS module we demonstrate 3D models with reduced geometry to achieve principle information about the wavefield. For a benchmark, a high-speed workstation with limited memory (RAM) is compared to the most potent ...

Extraction of Electrical Equivalent Circuit of One Port SAW Resonator Using FEM-based Simulation

A. K. Namdeo [1], H. B. Nemade [1],
[1] Department of Electronics and Electrical Engineering, Indian Institute of Technology Guwahati, Guwahati, Assam, India

The paper presents a method of extraction of electrical equivalent circuit of a one port surface acoustic wave (SAW) resonator from the results of simulation based on finite element method (FEM) using COMSOL Multiphysics software. A one port SAW resonator consists of large number of periodic interdigital transducer (IDT) electrodes fabricated on the surface of a piezoelectric substrate. A ...

CMUT Based Free Membrane Intra-Cardiac Volumetric Blood Flow-Meter

P. Priya [1], B. D. Pant [2],
[1] Birla Institute of Technology and Science Pilani, Pilani, Rajasthan, India
[2] CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan, India

In this paper, a free membrane is used as a receiver to increase the capacitance and therefore the resolution of the flow meter. For the current application, from the wavelength of sound wave in soft tissue (c= 1540 m/s) the resolution was calculated to be 0.48 mm. This gives the first Eigen frequency of the capacitive structure according to which the poly silicon membrane was designed. After ...

Nanowire Based Flexible Piezoelectric Sensor for Structural Health Monitoring Applications

A. El Kacimi [1], E. Pauliac-Vaujour [1], J. Eymery [2]
[1] University Grenoble Alpes, CEA, LETI, MINATEC Campus, Grenoble, France
[2] University Grenoble Alpes, CEA, Grenoble, France

We report on the modeling of flexible piezoelectric capacitive sensor based on GaN wires grown by Metal Organic Vapor Phase Epitaxy. Single crystal cone-shaped wires with hexagonal cross section are embedded within dielectric layers (parylene) in between two metal electrodes to achieve a capacitive structure. The device characteristics directly depend on growth conditions for example by tuning ...