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Design of a MEMS Capacitive Comb-drive Accelerometer

T. Kaya[1], B. Shiari[2], K. Petsch[1], and D. Yates[2]
[1]Central Michigan University, School of Engineering and Technology, Mount Pleasant, MI
[2]University of Michigan, Dept. of Electrical Engineering and Computer Science, Ann Arbor, MI

In this work, a MEMS low-g accelerometer with three sensitive directions is designed for health monitoring applications. The accelerometer may have different sensitivity in different axes. The proof-mass of the device is suspended by four serpentine springs, and the comb drive structure is used to form the differential capacitor to measure the displacement of the proof-mass. The structure has an ...

Optimizing the Performance of MEMS Electrostatic Comb-Drive Actuator with different Flexure Springs

S. Gupta[1], T. Pahwa[1], R. Bansal[1], V. Bansal[1], B. Prasad[1], D. Kumar[1]
[1]Electronic Science Department Kurukshetra University, Kurukshetra, Haryana

A new design of electrostatic comb drive actuator is presented in this paper by using different spring designs and with different folded beam lengths. An increased displacement of lateral comb drive actuator will subsequently be accomplished with the same actuation voltage. Stress distribution over different spring designs are simulated by COMSOL 3.5a using a standard comb drive with 4 movable ...

Time Dependent Simulations of Thermoelectric Thin Films and Nanowires for Direct Determination of their Efficiency with COMSOL Multiphysics®

M. Muñoz Rojo[1], J. Jose Romero[1], D. Ramos[1], D. Borca-Tasciuc[2], T. Borca-Tasciuc[2], M. Martín Gonzalez[1]
[1]Instituto de Microelectrónica de Madrid, Madrid, Spain
[2]Rensselaer Polytechnique Institute, Troy, New York, USA

Thermoelectric materials are one of the most promising materials for future and nowadays energy harvesting devices, as they can convert heat into electricity and vice-versa. The efficiency of thermoelectric materials is related with the figure of merit, ZT. Our work deals with the determination of the parameters that affect the measurement of the ZT with the Harman technique and the best ...

A Dynamic Electrowetting Simulation using the Level-Set Method

B. Cahill[1], A. Giannitsis[1], G. Gastrock[1], M. Min[1,2], and D. Beckmann[1]
[1]Institut für Bioprozess- und Analysenmesstechnik e.V., Heiligenstadt, Germany
[2] Department of Electronics, Tallinn University of Technology, Tallinn, Estonia

Electrowetting occurs with the electrical control of the surface wetting properties through the application of an electric potential. A simulation of electrowetting driven droplet dynamics is performed using the COMSOL Multiphysics level-set method for a sessile droplet and for a droplet in a microchannel. The response of the drop to a step voltage is studied. The contact angle at one edge of ...

Air Damping of Oscillating MEMS Structures: Modeling and Comparison with Experiment

S. Gorelick[1], M. Leivo[1], U. Kantojärvi[1]
[1]VTT Technical Research Centre of Finland, Espoo, Finland

Excessive air damping can be detrimental to the performance of oscillating MEMS components. Complex systems, such as structures in pre-etched cavities or angular comb-drive scanning mirrors, typically require simulations to reliably evaluate the air damping. The simulated and experimental performance of the following systems was evaluated and compared: two types of out-of-plane cantilevers, in ...

Parametric Study of Polyimide - Lead Zirconate Titanate Thin Film Cantilevers for Transducer Applications

A. Arevalo[1], I.G. Foulds[1]
[1]King Abdullah University of Science and Technology, Thuwal, Kingdom of Saudi Arabia

The simulation of the piezoelectric actuation of the micro-cantilever is presented. Lead Zirconate Titanate (PZT) was chosen for the device fabrication design, due to its thin film processing flexibility. Four layers compose the cantilever structures presented in this work: PZT (piezoelectric material), Platinum (electrodes) and Zirconium Oxide as the buffer layer for the PZT film and polyimide ...

Modeling and Analysis of Thermal Bimorph using COMSOL Multiphysics®

Rachita Shettar[1], Dr. B G. Sheparamatti[1]
[1]Basaveshwar Engineering College, Bagalkot, Karanataka, India

In this paper modeling and simulation results of a thermal bimorph is capable of producing increased displacement for increasing temperatures are presented. Thermal bimorphs are popular actuation technology in MEMS (Micro-Electro-Mechanical Systems). Bimorph actuators consist of two materials with different coefficients of thermal expansion. The main objective of this work is to investigate the ...

Design of MEMS Based High Sensitivity and Fast Response Capacitive Humidity Sensor

R. Karthick, S. P. K. Babu, A. R. Abirami, and S. Kalainila
Periyar Maniammai University
Periyar Nagar
Vallam, Thanjavur
Tamilnadu, India

This paper presents the design and simulation of high sensitivity and fast response capacitive humidity sensor. Generally, the capacitive humidity sensor is made up of parallel electrode, the upper electrode being a grid with various line width and line spacing. A model is simulated using COMSOL Multiphysics. High sensitivity and fast response of the model is optimized by varying the ...

Simulation of Piezoelectric Nanofibers for Harvesting Energy Applications - new

S. Rouabah[1], A. Chaabi[1]
[1]Electronics Department, Constantine University, Constantine, Algeria

In this work, we have taken a model which is simulated using COMSOL Multiphysics®. It was used as a tool to design, characterize and to simulate an example which is nanofibers based piezoelectric energy generators. The results are compared with other available sources but using with another materials. After applying a pressure on the top of surface of nanogenerator, the output parameters ...

Study of Capacitance in Electrostatic Comb-Drive Actuators

P. Hanasi [1], B. G. Sheeparamatti [1], V. Abbigeri [1], N. Meti [1],
[1] Visvesvaraya Technological University, Belagavi, Karnataka, India

Capacitor is mainly defined as two conducting plates that can hold the opposite charges on it. These plates can be used either as a sensor or an actuator. If the relative distance between the two conductors changes as result of given input, then capacitance values will change. This results in basic of capacitive or electrostatic sensing configuration. On the other hand, if a voltage or the ...