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Design and Simulation of a Cantilever Array for Fluid Flow Sensing Applications

K. Kavitha[1], Y. R. Manjoosha[1], C. S. Sukanya[1], K. Saranya[1], K. Chandra Devi[1], M. Alagappan[1], A. Gupta[1]
[1]Department of Biomedical Engineering, PSG college of technology, Coimbatore, TamilNadu, India

The biological hair-cell is a modular building block of a rich variety of biological sensors. These sensors are responsive to various mechanical properties like vibration, touch, gravitational forces, etc., especially flow. Using micro and nano-fabrication technology, an engineering equivalent of such sensors have been reported to be fabricated, imitating the structure and transfer function of ...

Study of Fluid Dynamics and Heat Transfer in MEMS Structures

S. N. Das[1], G. Bose[2]
[1]Centurion University of Technology and Managment, Jatani, Bhubaneswar, Orissa, India
[2]Institute of Technical Education and Research, SOA University, Bhubaneswar, Orissa, India

This paper describes the characteristics of MEMS microchannel and various issues of its designing. Here the major parameters are pressure drop and heat transfer rate. Various structures are modeled and optimized to get a minimum pressure drop and maximum heat transfer rate. The simulation results provide the characterization for Temperature, Mass flow rate, Pressure drop and Reynolds number. Here ...

Fluidmechanical Damping Analysis of Resonant Micromirrors with Out-of-plane Comb Drive

T. Klose[1], H. Conrad[2], T. Sandner[1], and H. Schenk[1]

[1]Fraunhofer Institute Photonic Microsystems (FhG-IPMS), Germany
[2]TU Dresden, Semiconductor and Microsystems Technology Laboratory, Germany

Damping is the liminting factor for the reachable maximum deflection. Thus, it is a very important issue for resonant microsystems. In this paper, we present a damping model for out-of-plane comb driven resonant micromirrors. The basic concept of this model is to attribute viscous damping in the comb gaps as the dominant contributor of damping moments. The model is extended by findings from a ...

Near-Wall Dynamics of Microbubbles in an Acoustical Trap - new

L. Wright[1], G. Memoli[1], P. Jones[2], E. Stride[3]
[1]National Physical Laboratory, Teddington, UK
[2]University College London, London, UK
[3]University of Oxford, Oxford, UK

Understanding the interactions between microbubbles and surfaces is key to the successful deployment of microbubbles in a range of applications. Two important examples are their use as a drug delivery mechanism, and their potential use of acoustically-driven bubbles as microscale sensors. Drug delivery with bubbles involves sonication at high frequency close to a boundary, and sensing with ...

The Simulation of Motion of a Slider upon a Stator Due to Frictional Force Using COMSOL Multiphysics® Software - new

H. B. Nemade[1]
[1]Indian Institute of Technology Guwahati, Guwahati, Assam, India

The Surface Acoustic Wave (SAW) linear motor was studied which is developed utilizing the friction principle for driving. The principle says that, when a slider is placed on the Rayleigh waves generated on a stator, the slider moves in reverse direction of the wave due to friction between the stator and the slider. A LiNbO3 piezoelectric substrate is used as a stator where comb structured Al ...

Carbon Nanotube Based Mass Sensor Using Atomic Resolution Nanomechanical Resonators

M. Roshini[1], G .B. Priyanga[1], K. C. Devi[1]
[1]PSG College of Technology, Coimbatore, Tamil Nadu, India

The objective of this paper is to design and simulate Carbon Nano-Tube (CNT) based mass sensor that determines extremely low measures of molecules using COMSOL Multiphysics® software. The ultimate goal of this nanomechanical resonator sensor is that it allows detection at single molecular level. The change in the mass from the resonator can cause a shift in the resonant frequency. The ...

Experimentally Matched Finite Element Modeling of Thermally Actuated SOI MEMS Micro-Grippers Using COMSOL Multiphysics

M. Guvench[1], and J. Crosby[1]
[1]University of Southern Maine, Gorham, Maine, USA

In “Micro-Electro-Mechanical-Systems” shortly known as MEMS, one of the most important and effective principle of creating transduction of electrical power to displacement force is thermal expansion. A slim beam of MEMS material, typically Silicon, is heated by the application of electrical current via Joule heating; it expands and creates motion. In the design of many MEMS devices ...

Simulation of Thermal Sensor for Thermal Control of Satellite Using COMSOL Multiphysics

G. Mangalgiri
Goa, India

The actuator comprises of a temperature sensitive composite deflecting beam, a piezoelectric substrate and a field effect transistor. The temperature rise causes an expansion in the composite beam thereby causing it to deflect. The deflecting beam impinges on the piezoelectric crystal and generating voltage. Response curves for the deflection versus temperature for temperature ranges ...

FEM Based Estimation of Biological Interaction Using a Cantilever Array Sensor

S. Logeshkumar, L. Lavanya, G. Anju, and M. Alagappan
PSG College of Technology
Tamil Nadu, India

In the model silicon nanorods are designed as cantilever array and coated with thin film of aluminum or aluminum nitride, to be characterized, thus, adding a detectable mass and altering the cantilever resistance to bending. The simulated results show that when films of different thickness are placed on the cantilever, there is a corresponding change in the resonant frequency and the ...

Mechanical Model of RF MEMS Capacitor Structures

R. Chatim[1]
[1]University of Kassel, Kassel, Germany

In order to design an RF MEMS based device, it is beneficial to have information concerning mechanical behavior. For model verification purpose, solution offered by simulation software equipped with predefined physics application is one valuable way to provide initial reference. To avoid unwanted particular total strain in RF MEMS structures, a compensation layer can be utilized. When the number ...