ASML Advances Photolithography Systems with Multiphysics Simulation
Fred Huizinga, ASML, Netherlands
At ASML, the development of cutting-edge computer chips and the machinery to produce them requires a complex understanding of the many coupled physical processes involved. To design machines at this level of precision requires simulation at every step, making the availability of a comprehensive simulation toolbox invaluable. For example, engineers at ASML worked on the design of an air bearing responsible for high-precision movements in photolithography machines. They also created simulation apps to allow colleagues throughout the team to virtually test the performance of different designs.
Suggested Stories
Optimizing Wireless Test Systems and Antennas for High-Speed Communication
To design reverberation systems for measuring the performance of wireless devices and wideband antennas, engineers at ...
Modeling Helps Improve Safety in the Production of Teflon
BAM German Federal Institute for Materials Research & Testing in Berlin promotes industrial development by ...
Doubling Beam Intensity Unlocks Rare Opportunities for Discovery at Fermi National Accelerator Laboratory
Behind the discovery of the most fundamental and rare physical processes within our universe is powerful technology, ...
Get an Inside Look at How Samsung Uses Acoustics Simulations
Step into the state-of-the-art Samsung Audio Lab to see how they develop loudspeakers, soundbars, and other audio ...
