Surface Chemistry Tutorial

Application ID: 9663

Surface chemistry is often the most important and most overlooked aspect of reacting flow modeling. Surface rate expressions can be hard to find or not even exist at all. Often it is preferable to use sticking coefficients to describe surface reactions because they can be estimated intuitively.
The tutorial model simulates outgassing from a wafer during a chemical vapor deposition (CVD) process. Careful attention is paid to the overall mass balance in the system and the difference between the mass averaged velocity and diffusion velocity is explored.

This model example illustrates applications of this type that would nominally be built using the following products:

Plasma Module