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Die Modell Galerie umfasst COMSOL Multiphysics Modelldateien aus einer Vielzahl von Anwendungsbereichen, die von Mechanik und Elektronik über Strömungen bis zur Chemie reichen. Sie können fertige Modelle herunterladen sowie Schritt-für-Schritt-Anleitungen, mit denen Sie die Modelle nachbauen können, und verwenden Sie die Modelle als Ausgangspunkt für Ihre eigenen Anwendungen. Nutzen Sie die Quick Search, um die für Ihren Fachbereich relevanten Modelle zu finden. Um die Dateien herunterzuladen, loggen Sie sich ein oder erzeugen Sie einen COMSOL Access Account, der mit einer gültigen COMSOL Lizenz assoziiert ist.

Differential Pumping

Differentially pumped vacuum systems use a small orifice or tube to connect two parts of a vacuum system that are at very different pressures. Such systems are necessary when processes run at higher pressures and are monitored by detectors that require UHV for operation. In this model, gas flow through a narrow tube and into a high vacuum chamber is approximated using an analytic expression for ...

Knudsen Minimum

When a constant pressure difference drives flow through a narrow constriction between parallel plates (or through a cylindrical tube), the flow rate exhibits a characteristic minimum as the absolute pressure at the inlet is reduced. This phenomenon is commonly referred to as Knudsen’s minimum, and occurs as a result of the rarefaction of the gas. The observation of a minimum in flow rate for ...

Ion Implanter Evaluator

This example shows how to model an ion implantation system using the Molecular Flow interface available in the Molecular Flow Module. In ion implantation, outgassing molecules interact with the ion beam to produce undesirable species. The average number density of outgassing molecules along the beam path is used as a figure of merit to evaluate the design. Furthermore, the angle of the wafer ...


This model shows how to compute the thickness of a thermally evaporated gold film. The thickness of the deposited film is computed both on the walls of the chamber and on the sample.

Molecular Flow Through an S-Bend

This model computes the transmission probability through an s-bend geometry using both the angular coefficient method available in the Free Molecular Flow interface and a Monte Carlo method using the Mathematical Particle Tracing interface. The computed transmission probability by the two methods is in excellent agreement with less than a 1% difference. This model requires the Particle Tracing ...

Adsorption and Desorption of Water in a Load Lock Vacuum System

This model shows how to simulate the time-dependent adsorption and desorption of water in a vacuum system at low pressures. The water is introduced into the system when a gate valve to a load lock is opened and the subsequent migration and pumping of the water is modeled.

Rotating Plate in a Unidirectional Molecular Flow

This model computes the particle flux, number density and pressure on the surface of a plate that rotates in a highly directional molecular flow. The results obtained are compared with those from other, approximate, techniques for computing molecular flows.

Molecular Flow Through a Microcapillary

Computing molecular flows in arbitrary geometries produces complex integral equations that are very difficult to compute analytically. Analytic solutions are, therefore, only available for simple geometries. One of the earliest problems solved was that of gas flow through tubes of arbitrary length, which was first treated correctly by Clausing. Later, the integral expressions he derived were ...

Ultra-high Vacuum, Chemical Vapor Deposition

Chemical vapor deposition (CVD) is a process often used in the Semiconductor industry to grow layers of high-purity solid material on top of a wafer substrate. CVD is achieved using many different techniques and across a range of pressures from atmospheric, to ultrahigh vacuum (UHV/CVD). UHV/CVD is performed at pressures below 10-6 Pa (10-8 Torr), so gas transport is achieved by molecular flow ...

Outgassing Pipes

This benchmark model computes the pressure in a system of outgassing pipes with a high aspect ratio. The results are compared with a 1D simulation and a Monte-Carlo simulation of the same system from the literature.

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