Application ID: 14313
Differentially pumped vacuum systems use a small orifice or tube to connect two parts of a vacuum system that are at very different pressures. Such systems are necessary when processes run at higher pressures and are monitored by detectors that require UHV for operation. In this model, gas flow through a narrow tube and into a high vacuum chamber is approximated using an analytic expression for the flow rate. The model can also be adapted to use experimental data directly. The results obtained by coupling the analytic model to the free molecular flow interface are compared with a simulation that incorporates free molecular flow in both the tube and the UHV part of the system.
This model example illustrates applications of this type that would nominally be built using the following products:Molecular Flow Module
however, additional products may be required to completely define and model it. Furthermore, this example may also be defined and modeled using components from the following product combinations:
The combination of COMSOL® products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Particular functionality may be common to several products. To determine the right combination of products for your modeling needs, review the Spezifikationstabelle and make use of a free evaluation license. The COMSOL Sales and Support teams are available for answering any questions you may have regarding this.