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Microwave Microplasma

Plasmas sustained in microscale discharge gaps are able to operate at high pressure (1 atm) with high electron number density (10{:sup}20{:/sup} m{:sup}-3{:/sup}) and power density (10{:sup}9{:/sup} W.m{:sup}-3{:/sup}) while maintaining a relatively cool heavy-particle temperature. This model simulates an atmospheric pressure argon plasma sustained by a time-varying electric excitation in the ...

Boltzmann DC Glow Discharge

This application models a DC glow discharge. The electron energy distribution function (EEDF) and electron transport properties are computed with the *Boltzmann Equation, Two-Term Approximation* interface. Since input parameters for the *Boltzmann Equation, Two-Term Approximation* interface, like the ionization degree of the plasma, are not known *a priori*, an iterative process is performed. A ...

Harmonic Content of the Power Deposition into a Dual Frequency Capacitively Coupled Plasma

Energy transfer from the time varying electrostatic field to electrons in a capacitively coupled plasmas (CCP) does not exclusively occur at twice the RF frequency. Due to the highly nonlinear mechanism of power transfer from the fields to the electrons, power deposition occurs at frequencies higher than twice the driving frequency. For dual frequency CCP reactors the harmonic content of the ...

Negative Streamer in Nitrogen

Streamers are transient filamentary electric discharges that can develop in a nonconducting background in the presence of an intense electric field. These discharges can attain high electron number density and consequently a high concentration of chemical active species that are relevant for numerous applications. Industrial applications include ozone production, pollution control, and surface ...

Chlorine Discharge Global Model

Plasma discharges containing chlorine are commonly used to etch semiconductors and metals in microelectronics fabrication. This tutorial model studies chlorine plasma discharges using a global (volume-averaged) diffusion model. Global diffusion models can run simulations in a fraction of the time it would take for space-dependent models. This makes them a good choice to study large reaction ...

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