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MEMS and Nanotechnologyx

Study of Effect on Resonance Frequency of Piezoelectric Unimorph Cantilever for Energy Harvesting

G. R. Prakash[1], K. M. V. Swamy[1], S. Huddar[1], B. G. Sheeparamatti[1], Kirankumar B. B.[1]
[1]Basaveshwar Engineering College, Bagalkot, Karnataka, India

The focus of this paper is to study the effect on resonance frequency and power enhancement techniques[1] of piezoelectric MEMS and modeling, design, and optimization of a piezoelectric generator based on a two-layer bending element(Figure 1) using COMSOL Multiphysics. An analytical ... Mehr lesen

Simulation of a Micro-Scale Out-of-plane Compliant Mechanism new

E. Rawashdeh[1], A. Arevalo[1], D. Castro[1], I. G. Foulds[2], N. Dechev[3]
[1]Computer, Electrical & Mathematical Sciences & Engineering Division (CEMSE), King Abdullah University of Science & Technology, Thuwal, Saudi Arabia
[2]School of Engineering, Okanagan Campus, The University of BC, Vancouver, BC, Canada
[3]University of Victoria, Victoria, BC, Canada

In this work we present the simulation of a micro-scale large displacement compliant mechanism called the Tsang suspension. It consists of a flat micro-plate anchored down by two springs on either side, that can rotate out-of-plane and maintain its vertical assembly by a simple single ... Mehr lesen

Design and Analysis of MEMS Gyroscope

L. Sujatha[1], B. Preethi[1]
[1]Rajalakshmi Engineering College, Chennai, India

MEMS gyroscope technology provides cost- effective method for improving directional estimation and overall accuracy in the navigation systems. This paper presents a tuning- fork gyroscope (TFG) [1] with a perforated proof mass. The perforated proof mass used in the design enables the ... Mehr lesen

CVD Graphene Growth Mechanism on Nickel Thin Films new

K. Al-Shurman[1], H. Naseem[2]
[1]The Institute for Nanoscience & Engineering, University of Arkansas, Fayetteville, AR, USA
[2]Department of Electrical Engineering, University of Arkansas, Fayetteville, AR, USA

Chemical vapor deposition is considered a promising method for synthesis of graphene films on different types of substrate utilizing transition metals such as Ni. However, synthesizing a single-layer graphene and controlling the quality of the graphene CVD film on Ni are very ... Mehr lesen

Optimizing the Performance of MEMS Electrostatic Comb-Drive Actuator with different Flexure Springs

S. Gupta[1], T. Pahwa[1], R. Bansal[1], V. Bansal[1], B. Prasad[1], D. Kumar[1]
[1]Electronic Science Department Kurukshetra University, Kurukshetra, Haryana

A new design of electrostatic comb drive actuator is presented in this paper by using different spring designs and with different folded beam lengths. An increased displacement of lateral comb drive actuator will subsequently be accomplished with the same actuation voltage. Stress ... Mehr lesen

Tunable MEMS Capacitor for RF Applications

H. S. Shriram[1], T. Nimje[1], D. Vakharia[1]
[1]BITS Pilani, Rajasthan, India

Radio Frequency MEMS devices have emerged to overcome the problem of high losses associated with semiconductors at high frequencies. A tunable MEMS capacitor is a micrometre-scale electronic device whose capacitance is controlled through different actuation mechanisms which govern the ... Mehr lesen

Surface Plasmon Resonance

J. Crompton[1], S. Yushanov[1], L.T. Gritter[1], K.C. Koppenhoefer[1]
[1]AltaSim Technologies, Columbus, OH, USA

The resonance conditions for surface plasmons are influenced by the type and amount of material on a surface. Full insight into surface plasmon resonance requires quantum mechanics considerations. However, it can be also described in terms of classical electromagnetic theory by ... Mehr lesen

Design & Simulation of Various Shapes of Cantilever Beam for Piezoelectric Power Generator

P. Graak [1], S. Kaur [1], A. Gupta [1], P. Chhabra [1], D. Kumar [1], A. Shetty [2]
[1] Kurukshetra University, Kurukshetra, Haryana, India
[2] Indian Institute of Science, Bengaluru, Karnataka, India

The ambient vibrations can be of great promise for harvesting energy initially at small scale to use for micro and nano scale devices. Such vibrations converted to electrical energy by piezoelectric transducer due to their major significance. Various research journals have introduced the ... Mehr lesen

Air Damping of Oscillating MEMS Structures: Modeling and Comparison with Experiment

S. Gorelick[1], M. Leivo[1], U. Kantojärvi[1]
[1]VTT Technical Research Centre of Finland, Espoo, Finland

Excessive air damping can be detrimental to the performance of oscillating MEMS components. Complex systems, such as structures in pre-etched cavities or angular comb-drive scanning mirrors, typically require simulations to reliably evaluate the air damping. The simulated and ... Mehr lesen

Sensitivity Analysis of Different Models of Piezoresistive Micro Pressure Sensors

S. Meenatchisundaram[1], S. M. Kulkarni[2], S. Bhat
[1]Department of Instrumentation and Control Engineering, Manipal Institute of Technology, Manipal, Karnataka, India.
[2]Department of Mechanical Engineering, National Institute of Technology, Surathkal, Karnataka, India.

Piezoresistive pressure sensors have received much attention over the years because of low cost, simple measurement techniques, etc. There is a challenge in design with respect to appropriate positioning, shape and temperature compensation. Different models of piezoresistive pressure ... Mehr lesen

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