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Study of Effect on Resonance Frequency of Piezoelectric Unimorph Cantilever for Energy Harvesting

G. R. Prakash[1], K. M. V. Swamy[1], S. Huddar[1], B. G. Sheeparamatti[1], Kirankumar B. B.[1]
[1]Basaveshwar Engineering College, Bagalkot, Karnataka, India

The focus of this paper is to study the effect on resonance frequency and power enhancement techniques[1] of piezoelectric MEMS and modeling, design, and optimization of a piezoelectric generator based on a two-layer bending element(Figure 1) using COMSOL Multiphysics. An analytical relation was developed based on the shift in resonance frequency(Figure 2) caused by the addition of a thin film ...

Design and Analysis of MEMS Gyroscope

L. Sujatha[1], B. Preethi[1]
[1]Rajalakshmi Engineering College, Chennai, India

MEMS gyroscope technology provides cost- effective method for improving directional estimation and overall accuracy in the navigation systems. This paper presents a tuning- fork gyroscope (TFG) [1] with a perforated proof mass. The perforated proof mass used in the design enables the reduction of the damping effect. This MEMS based gyroscope was designed using COMSOL Multiphysics 4.2a. This ...

Sensitivity Analysis of Different Models of Piezoresistive Micro Pressure Sensors

S. Meenatchisundaram[1], S. M. Kulkarni[2], S. Bhat
[1]Department of Instrumentation and Control Engineering, Manipal Institute of Technology, Manipal, Karnataka, India.
[2]Department of Mechanical Engineering, National Institute of Technology, Surathkal, Karnataka, India.

Piezoresistive pressure sensors have received much attention over the years because of low cost, simple measurement techniques, etc. There is a challenge in design with respect to appropriate positioning, shape and temperature compensation. Different models of piezoresistive pressure sensors are proposed to enhance its sensitivity in terms of output voltage. This paper aims in sensitivity ...

CVD Graphene Growth Mechanism on Nickel Thin Films - new

K. Al-Shurman[1], H. Naseem[2]
[1]The Institute for Nanoscience & Engineering, University of Arkansas, Fayetteville, AR, USA
[2]Department of Electrical Engineering, University of Arkansas, Fayetteville, AR, USA

Chemical vapor deposition is considered a promising method for synthesis of graphene films on different types of substrate utilizing transition metals such as Ni. However, synthesizing a single-layer graphene and controlling the quality of the graphene CVD film on Ni are very challenging due to the multiplicity of the CVD growth conditions. COMSOL Multiphysics® software is used to investigate ...

Tunable MEMS Capacitor for RF Applications

H. S. Shriram[1], T. Nimje[1], D. Vakharia[1]
[1]BITS Pilani, Rajasthan, India

Radio Frequency MEMS devices have emerged to overcome the problem of high losses associated with semiconductors at high frequencies. A tunable MEMS capacitor is a micrometre-scale electronic device whose capacitance is controlled through different actuation mechanisms which govern the moving parts. It can have electrostatic or electrothermal actuators depending on the functional complexity and ...

Optimizing the Performance of MEMS Electrostatic Comb-Drive Actuator with different Flexure Springs

S. Gupta[1], T. Pahwa[1], R. Bansal[1], V. Bansal[1], B. Prasad[1], D. Kumar[1]
[1]Electronic Science Department Kurukshetra University, Kurukshetra, Haryana

A new design of electrostatic comb drive actuator is presented in this paper by using different spring designs and with different folded beam lengths. An increased displacement of lateral comb drive actuator will subsequently be accomplished with the same actuation voltage. Stress distribution over different spring designs are simulated by COMSOL 3.5a using a standard comb drive with 4 movable ...

Surface Plasmon Resonance

J. Crompton[1], S. Yushanov[1], L.T. Gritter[1], K.C. Koppenhoefer[1]
[1]AltaSim Technologies, Columbus, OH, USA

The resonance conditions for surface plasmons are influenced by the type and amount of material on a surface. Full insight into surface plasmon resonance requires quantum mechanics considerations. However, it can be also described in terms of classical electromagnetic theory by considering electromagnetic wave reflection, transmission, and absorption for the multi-layer medium. The two commonly ...

Air Damping of Oscillating MEMS Structures: Modeling and Comparison with Experiment

S. Gorelick[1], M. Leivo[1], U. Kantojärvi[1]
[1]VTT Technical Research Centre of Finland, Espoo, Finland

Excessive air damping can be detrimental to the performance of oscillating MEMS components. Complex systems, such as structures in pre-etched cavities or angular comb-drive scanning mirrors, typically require simulations to reliably evaluate the air damping. The simulated and experimental performance of the following systems was evaluated and compared: two types of out-of-plane cantilevers, in ...

Design of a MEMS Capacitive Comb-drive Accelerometer

T. Kaya[1], B. Shiari[2], K. Petsch[1], and D. Yates[2]
[1]Central Michigan University, School of Engineering and Technology, Mount Pleasant, MI
[2]University of Michigan, Dept. of Electrical Engineering and Computer Science, Ann Arbor, MI

In this work, a MEMS low-g accelerometer with three sensitive directions is designed for health monitoring applications. The accelerometer may have different sensitivity in different axes. The proof-mass of the device is suspended by four serpentine springs, and the comb drive structure is used to form the differential capacitor to measure the displacement of the proof-mass. The structure has an ...

Study of Capacitance in Electrostatic Comb-Drive Actuators

P. Hanasi [1], B. G. Sheeparamatti [1], V. Abbigeri [1], N. Meti [1],
[1] Visvesvaraya Technological University, Belagavi, Karnataka, India

Capacitor is mainly defined as two conducting plates that can hold the opposite charges on it. These plates can be used either as a sensor or an actuator. If the relative distance between the two conductors changes as result of given input, then capacitance values will change. This results in basic of capacitive or electrostatic sensing configuration. On the other hand, if a voltage or the ...

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