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Design of a MEMS Resonator for a Centre Frequency Greater than 26.35 MHz and Temperature Coefficient Frequency Less than 0.5 ppm

S.Manikandan[1], R.Radeep krishna[1]
[1]Kalasalingam University, Department of ECE, Srivilliputtur ,Krishnan koil, Tamil Nadu, India

The variability of the design parameters caused by material properties like thermal conductivity is the major challenge in Micro Electromechanical System (MEMS). In resonator design the basic problem is that the frequency changes with temperature variation and quantitative explanation with respect to this varies. The change can be attributed to the stability in terms of frequency drift in parts ...

DNA Interactions in Crowded Nanopores - new

K. Misiunas[1], N. Laohakunakorn[1], S. Ghosal[2], O. Otto[1], U. F. Keyser[1]
[1]University of Cambridge, Cambridge, UK
[2]Northwestern University, Evanston, IL, USA

The motion of DNA in crowded environments is a common theme in physics and biology. Examples include gel electrophoresis and the self-interaction of DNA within cells and viral capsids. Here we study the interaction of multiple DNA molecules within a nanopore by tethering the DNA to a bead held in a laser optical trap to produce a "molecular tug-of-war". We measure this tether force as a function ...

Statistical Modeling and Contact Analysis of RF MEMS Surface

J. Liu [1], V. B. Chalivendra [1], C. Goldsmith [2], W. Huang [1],
[1] Department of Mechanical Engineering, University of Massachusetts - Dartmouth, Dartmouth, MA, USA
[2] MEMtronics Corporation, Richardson, TX, USA

Radio frequency (RF) micro-electro mechanical system(MEMS) switch works in on/off modes controlled by electrostatic forces. In off mode, rough surfaces of electrodes come into a contact to shunt the RF signal. Surface contact area has been recognized as a key factor in RF MEMS performance and reliability. Multi scale regular-fractal structure is observed on MEMS surface. Nonlinear Structural ...

Modeling Directed Self-Assembly of Block Copolymers for Lithographic Applications

A. Fouquet [1], R. Orobtchouk [2], J. Hazart [1],
[1] CEA-LETI, Grenoble, France
[2] Institut des Nanosciences de Lyon (INL), Villeurbanne, France

Nano patterning for chip manufacturing has reached its limitation with 193i lithography standard process. Directed Self Assembly (DSA) of Block Co-Polymers (BCP) is envisaged as an alternative complementary technique that can reduce critical dimension and pitch with high throughput and limited cost [1]. For contact layers that require patterning of cylinders with diameter of tens nanometers, DSA ...

Multiple-Mode Polymeric-Silicon Dual-Channel Gas Sensors

K. Liang [1], A. Dodabalapur [1], D. Sharma [1],
[1] Microelectronics Research Center, University of Texas, Austin, TX, USA

An organic-inorganic dual-channel sensor makes a strong chemical gas sensor because this device design combines the high chemical sensitivities and selectivity of organic semiconductors [1-4] with the superior electrical performance and convenient integration of silicon semiconductors. As shown in the device schematic in Figure 1, the organic channel is the chemically-active material and is ...

Modeling and Simulation of the Rapid and Automated Measurement of Biofuel Blending in a Microfluidic Device under Pressure Driven Flow using COMSOL Multiphysics®

Sanket Goel[1], Venkateswaran PS[1], Rahul Prajesh[2], Ajay Agarwal[2]
[1]University of Petroleum & Energy Studies, Bidholi, Prem Nagar, Dehradun, India
[2]CSIR - Central Electronics Engineering Research Institute,(CSIR-CEERI) Pilani, India

• Real-time detection and monitoring of bio-fuel blend-ratio and adulterated automobile fuels by a reproducible micro-fabrication process in a cost-and-time efficient manner. • COMSOL Multiphysics® simulations and modelling of Viscosity based Laminar Flow inside a Y-shaped Micro-fluidic Device. • Design and Fabrication of a polymer Y-shaped Micro-fluidic Device to work as Micro-Viscometer for ...

COMSOL Multiphysics Applied to MEMS Simulation and Design

Dr. Piotr Kropelnicki[1]
Mu Xiao Jing[1]
Wan Chia Ang[1]
Cai Hong[1]
Andrew B. Randles[1]

[1]Institute of Microelectronics, Agency for Science, Technology and Research, Singapore, Singapore

In this research, we performed multiple COMSOL Multiphysics® simulations. We analyzed the dispersion curves of waves in a LAMB wave pressure sensor; simulated a thin metal film in a microbolometer and observed the resulting stress; investigated the thermal behavior of an acoustic wave microbolometer; and modeled the fluid-structure interaction (FSI) for piezoelectric-based energy harvesting from ...

FEM Modeling in Robust Design for Graphene-Based Electromagnetic Shielding

S. Elia [1], G. Granata [1], P. Lamberti [1], V. Tucci [1],
[1] University Of Salerno, Italy

Electromagnetic shielding design is usually approached referring to nominal values of the main parameters. This could lead to malfunctioning devices and its performance differ widely from what was really aimed at or, worse, the final design product could even be physically unrealizable. This work presents a robust approach to the design of EM Shielding based on Graphene (Gph) layers. It is a two ...

Powerful automation and optimization methods for Material- and Process analysis with COMSOL Multiphysics and Matlab

T. Frommelt
SGL Group, Technology & Innovation, Meitingen, Germany

Thomas Frommelt received his PhD in physics in 2007 from the University of Augsburg for experimental work and simulation analysis on acoustically driven microfluidic mixing. In 2008, he joined the SGL Group and introduced COMSOL Multiphysics as the tool for flexible equation based modelling. Since then, he has focused on carbon material and process simulation employing methods of optimization ...

Design of MEMS based Polymer Microphone for Hearing Aid Application

V. S. Nagaraja[1], Ramanuja H. S.[1], Deepak K[1], S. L. Pinjare[1]
[1]Electronics and Communication Engineering, Nitte Meenakshi Institute of Technology, Bangalore, Karnataka, India

In this work, a MEMS based condenser microphone [1,2] using Polyimide as the diaphragm has been designed. The microphone structure has a backplate placed on top of the diaphragm. The backplate and the diaphragm are made up of polyimide. The two polyimide plates are separated by air gap which is achieved by using Aluminium as a sacrificial layer in between, which is etched away to create the air ...