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Study of Fluid Dynamics and Heat Transfer in MEMS Structures

S. N. Das[1], G. Bose[2]
[1]Centurion University of Technology and Managment, Jatani, Bhubaneswar, Orissa, India
[2]Institute of Technical Education and Research, SOA University, Bhubaneswar, Orissa, India

This paper describes the characteristics of MEMS microchannel and various issues of its designing. Here the major parameters are pressure drop and heat transfer rate. Various structures are modeled and optimized to get a minimum pressure drop and maximum heat transfer rate. The simulation results provide the characterization for Temperature, Mass flow rate, Pressure drop and Reynolds number. ...

COMSOL Multiphysics for the Designs and Applications on Biomicrofluidic Chips

I-Fang Cheng[1]
[1]National Nano Device Laboratories (NDL), National Applied Research Laboratories, Taipei, Taiwan

Some types of rare pathogens can be detected and identified in human blood through a low-cost and label-free method. The On-Chip SESR identification process has a fast detection time (about 5 minutes) and a low detection limit. Discrimination of a species is done by sorting red blood cells from bacteria. Simulations of dielectrophoretic (DEP) force, dual layer electrodes, and dynamic separation ...

Design and Simulation of MEMS-based Piezoelectric Accelerometer

Siram Sai Krishna[1], Nuti Venkata Subrahmanya Ayyappa Sai[1], Dr.K.Srinivasa Rao[2]
[1]Lakireddy Bali Reddy College of Engineering, Mylavaram, Andhra Pradesh, India
[2]Professor & HOD, Dept. of Electronics and Instrumentation Engineering, Lakireddy Bali Reddy College of Engineering, Mylavaram, Andhra Pradesh, India

The Micro electro mechanical systems (MEMS) technology provides us a platform to interface between mechanical and electrical components. In this paper, we have designed MEMS accelerometer based on piezoelectric property, and simulated using COMSOL Multiphysics®. The design, which has PZT kept in the annular diaphragm, provides good sensitivity. When this accelerometer is subjected to stress ...

Thermally Induced-Noise Reduction Using an Electrostatic Force Feedback

H. Lee, and J.V. Clark
Purdue University, West Lafayette, IN, USA

In this paper we present a method to mitigate the effect of thermally-induced noise in Micro-Electro-Mechanical Systems (MEMS) through a force feedback circuit. Inherent noise-induced vibrations, which would be inconsiderable in macro scale, are considered as a limitation in micro- and nano- scale since it diminishes the high performance of MEMS devices. For instance, depending on the stiffness ...

Ribbon Formation in Twist-Nematic Elastomers

L. Teresi[1], V. Varano[1]
[1]LaMS - Modelling & Simulation Lab, Università degli Studi Roma Tre, Roma, Italy

Nematic Elastomers (NEs) possess both the elastic properties of rubbers and the orientational properties of liquid crystals. Those two properties makes the configuration of NEs very sensitive to isotropic-nematic phase transition. Our goal is to replicate with numerical experiments the phenomena of shape formation in Twist-Nematic Elastomers (TNEs): a flat bar evolves into a helicoidal shape ...

Design of MEMS based Polymer Microphone for Hearing Aid Application

V. S. Nagaraja[1], Ramanuja H. S.[1], Deepak K[1], S. L. Pinjare[1]
[1]Electronics and Communication Engineering, Nitte Meenakshi Institute of Technology, Bangalore, Karnataka, India

In this work, a MEMS based condenser microphone [1,2] using Polyimide as the diaphragm has been designed. The microphone structure has a backplate placed on top of the diaphragm. The backplate and the diaphragm are made up of polyimide. The two polyimide plates are separated by air gap which is achieved by using Aluminium as a sacrificial layer in between, which is etched away to create the air ...

Designing and Simulating the Performance Analysis of Piezoresistive Fluid Flow Pressure Sensor

K. PraveenKumar[1], P. Suresh[1], K. Subash[1], M. Alagappan[1], A. Gupta[1]
[1]PSG College of Technology, Coimbatore, Tamil Nadu, India.

In this work, we present the performance analysis of novel micro machined Piezoresistive fluid flow pressure sensor using COMSOL Multiphysics. The principle of the sensing mechanism is based on the deflection of four sensing layers embedded on a thin membrane. The fluid passes through the layer causes the deflection of the sensing layer which measures the pressure of the fluid. The following ...

FEM Study on Contactless Excitation of Acoustic Waves in SAWDevices

A. K. Namdeo[1], N. Ramakrishna[2], H. B. Nemade[1,2], and R. P. Palathinkal[1]

[1] Department of Electronics and Communication Engineering, Indian Institute of Technology Guwahati, Assam, India
[2] Centre for Nanotechnology. Indian Institute of Technology Guwahati, Assam, India

In this paper a finite element method(FEM) study of a surface acoustic wave (SAW)device excited by electrostatic coupling method is performed by using COMSOL Multiphysics. We have modeled a Rayleigh wave type SAW device by choosing YZ Lithium niobate as the substrate. The effect of external radio frequency (RF) field to the SAW device is analyzed. The effect of distance between the contactless ...

Design of Novel Recirculation System for Slow Reacting Assays in Microfluidic Domain

N.N. Sharma, and A. Tekawade
Mechanical Engineering Group, Birla Institute of Technology & Science, Pilani, Rajasthan, India

A simple design for a microfluidic flow system for use in mixing or reacting assays with limited sample availability has been proposed and analyzed using COMSOL\'s multiphysics simulation package. The design is based on differential electroosmotic flow concept which has facilitated a number of interesting flow phenomena in micro-domains. For an average potential drop of about 86 kV/m in the ...

Modelagem Computacional de Difusores para Microbombas

A. G. S. Barreto Neto [1], A. M. N. Lima [2], C. S. Moreira [1],
[1] Instituto Federal de Ciência e Tecnologia - IFPB, João Pessoa, PB, Brasil
[2] Universidade Federal de Campina Grande - UFCG, Campina Grande, PB, Brasil

Este trabalho trata do dimensionamento da estrutura bocal/difusor utilizando a simulação computacional com fronteira móvel. Esse tipo de simulação contempla toda estrutura da bomba, isto é, câmara de bombeamento, difusor e área de dispersão de fluxo, de modo a contabilizar o refluxo em função da estrutura, possibilitando um projeto mais realísticos da estrutura.