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Experimentally Matched Finite Element Modeling of Thermally Actuated SOI MEMS Micro-Grippers Using COMSOL Multiphysics

M. Guvench[1], and J. Crosby[1]
[1]University of Southern Maine, Gorham, Maine, USA

In “Micro-Electro-Mechanical-Systems” shortly known as MEMS, one of the most important and effective principle of creating transduction of electrical power to displacement force is thermal expansion. A slim beam of MEMS material, typically Silicon, is heated by the application of electrical current via Joule heating; it expands and creates motion. In the design of many MEMS devices ...

Thermally Induced-Noise Reduction Using an Electrostatic Force Feedback

H. Lee, and J.V. Clark
Purdue University, West Lafayette, IN, USA

In this paper we present a method to mitigate the effect of thermally-induced noise in Micro-Electro-Mechanical Systems (MEMS) through a force feedback circuit. Inherent noise-induced vibrations, which would be inconsiderable in macro scale, are considered as a limitation in micro- and nano- scale since it diminishes the high performance of MEMS devices. For instance, depending on the stiffness ...

Optimization of Smart Diaphragm Material for Pressure Sensor in Ventilators

M. Algappan[1], P. C. Chakravarthi[1], R. Keerthana[1], S. Mangayarkarasi[1], A. Kandaswamy[1]
[1]PSG College of Technology, Coimbatore, Tamil Nadu, India

A medical ventilator is an imperative device used to save life by delivering an assortment of air and oxygen into and out of the patients’ lungs to administer breathing or to assist obligatory breathing. The commercially available diaphragm based pressure sensors made up of silicon measure the air and oxygen flow. The proposed work utilizes the Piezo electric material for the pressure range ...

Multiphysics System Simulation for MEMS Inertial Sensors

R. Sattler
University of Applied Sciences, Regensburg, Germany

This paper gives an overview of modelling microsensors on geometry and system level. The focus will be on the generation of the multiphysics reduced order system model and the coupling with package and ASIC models. The method is based on modal superposition. This means all the details of the sensor can be considered in a finite element model. The mechanical mode shapes of this model form the ...

Multi-Domain Analysis of Silicon Structures for MEMS Based-Sensors

N. Bhalla[1], S. Li[2], and D. Chung[1]
[1]Chung Yuan Christian University, Chungli,Taiwan
[2]National Tsing Hua University, Hsinchu, Taiwan

Investigation in this paper aims at performing Mechanical Stress Strain analysis, Thermal, Piezoresistive and Piezoeletric analysis of Silicon Structures using COMSOL. The simulation results have been cross checked by mathematical calculation.

The Simulation of Motion of a Slider upon a Stator Due to Frictional Force Using COMSOL Multiphysics® Software - new

H. B. Nemade[1]
[1]Indian Institute of Technology Guwahati, Guwahati, Assam, India

The Surface Acoustic Wave (SAW) linear motor was studied which is developed utilizing the friction principle for driving. The principle says that, when a slider is placed on the Rayleigh waves generated on a stator, the slider moves in reverse direction of the wave due to friction between the stator and the slider. A LiNbO3 piezoelectric substrate is used as a stator where comb structured Al ...

Modeling of Vibrating Atomic Force Microscope´s Cantilever within Different Frames of Reference

E. Kamau, and F. Voigt
University of Oldenburg, Germany

Cantilever vibration modes were simulated with COMSOL Multiphysics. In the 1st approach the model consisted of an excitation piezo, a holder plate and a chip where the cantilever was mounted on. A sinusoidal voltage signal was applied to the piezo in the simulation, which resulted in movements of the holder plate and finally led to the excitation of the cantilever. In the 2nd approach the model ...

The Effect of Electrochemical Micro-Milling by Rotating Magnetic Field

H-Y. Shen[1], H-P. Tsui[1], J-C .Hung[1], S-Y. Lin[2], and B-H. Yan[2]
[1]Metal Industries Research and Development Centre, Taichung, Taiwan
[2]National Central University, Chungli, Taiwan

In this work, the process of micro-channels in electrochemical micro-milling by using rotating magnet assisted helical tool is presented. The results show helical tool and Lorentz force of the rotating magnetic field that enhance the renewal of the electrolyte and machining efficiency. The feed rate can be raised under the magnetic field assisted in terms of experimental results; moreover, the ...

Xylophone Bar Magnetometry and Inertial-grade MEMS Optimisation: a Multiphysics Approach

H. T. D. Grigg, and B. J. Gallacher
Microsystems Group
Newcastle University
Newcastle upon Tyne
Tyne and Wear, UK

This paper presents ongoing research aimed at development of a MEMS magnetometer capable of nanoTesla sensitivity. Such a device would pave the way for inertial-grade MEMS IMUs. A resonant sensor is proposed, based on a Xylophone Bar sense element, and is analysed both directly and via COMSOL. Mode shapes and frequencies are found as functions of geometric parameters, and the results used ...

Development and Characterization of High Frequency Bulk Mode Resonators

H. Pakdast, Z. Davis
DTU Nanotech, Technical University of Denmark, Kgs. Lyngby, Denmark

This article describes the development of a bulk mode resonator which can be employed for detection of bio/chemical species in liquids.  The goal is to understand the mechanical and electrical properties of a bulk mode resonator device which exhibit high frequency resonance modes and Q-factor. A high resonance frequency is desirable because a small change in the resonator’s mass, for ...