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Contactless Excitation of MEMS Resonant Sensors by Electromagnetic Driving

M. Baù[1], V. Ferrari[1], and D. Marioli[1]
[1]Department of Electronics for Automation, University of Brescia, Brescia, Italy

A contactless electromagnetic principle for the excitation of mechanical vibrations in resonant structures has been investigated. The principle relies on no specific magnetic property of the resonator except electrical conductivity and can be adopted for employing the structures as resonant sensors for measurements either in environments not compliant with the requirements of active electronics ...

Design of an Electrodynamically Actuated Microvalve Using COMSOL Multiphysics® and MATLAB®

M. Williams, J. Zito, J. Agashe, A. Sopeju, and D. Arnold
University of Florida, Gainesville, USA

This paper describes the design of a normally closed, electrodynamic microvalve.  Magnetic forces between a permanent magnet in the valve cover and a soft magnet in the valve seat hold the valve closed.  The combination of electrodynamic actuation and a mechanical restoring spring are used to open the valve.  A device model and a design optimization strategy using COMSOL ...

FEM-Simulation of a Printed Acceleration Sensor with RF Readout Circuit

H. Schweiger[1], T. Göstenkors[1], R. Bau[1], D. Zielke[1]
[1]Dept. Engineering Sciences and Mathematics, University of Applied Sciences Bielefeld, Bielefeld, Germany

In this paper we want to figure out the development of a capacitive acceleration-sensor system with the FEM-Method. The sensor-system is in the position to detect accelerations in the range of ±20 g. Furthermore the sensor-element contains a printed RF-inductance, which is used for contactless data transfer. On the one hand the simulation of the L-C-oscillating circuit using the RF Module of ...

Reliability Enhancement of Bio MEMS based Cantilever Array Sensors for Antigen Detection System using Heterogeneous Modular Redundancy

L. S. Sundharam[1]
[1]Kumaraguru college of Technology, Coimbatore, Tamil nadu, India

The objective of the work is to propose a reliability enhancement model for antigen detection system (ADS) using bio MEMS based cantilever array sensors using heterogeneous modular redundancy technique. The reliability of the ADS is expressed in terms of the constituent sub systems which are heterogeneous not only in their respective structures and behaviors but also in their forms. The possible ...

The Simulation of Motion of a Slider upon a Stator Due to Frictional Force Using COMSOL Multiphysics® Software - new

H. B. Nemade[1]
[1]Indian Institute of Technology Guwahati, Guwahati, Assam, India

The Surface Acoustic Wave (SAW) linear motor was studied which is developed utilizing the friction principle for driving. The principle says that, when a slider is placed on the Rayleigh waves generated on a stator, the slider moves in reverse direction of the wave due to friction between the stator and the slider. A LiNbO3 piezoelectric substrate is used as a stator where comb structured Al ...

Optimization and Simulation of MEMS Based Thermal Sensor for Performance of Transformer Oil

V. Vijayalakshmi[1], K. C. Devi[1]
[1]PSG College of Technology, Coimbatore, Tamil Nadu, India

In this work, a bimetallic strip based thermal sensor was designed using MEMS module of COMSOL Multiphysics® software to monitor the temperature rise in insulating oil which was used as coolant in transformers. The bimetallic strip was designed with different shapes such as cylindrical, rectangle, square & conical and different compositions such as Al/Steel Alloy and Fe/Cu which can withstand ...

Princípio Calorimétrico Aplicado a Medição de Vazão - new

T. Cavalcanti[1], A. Lima[1], J. Neto[1]
[1]Universidade Federal de Campina Grande, Campina Grande, PB, Brasil

Introdução: A medição adequada de vazão de fluidos é de grande importância nos processos industriais, pois tem implicações diretas na qualidade, produtividade, segurança e eficiência dos processos. Assim, torna-se necessário compreendermos como os fluidos se comportam para baixas velocidades, podendo, dessa forma, projetar estruturas que possam trabalhar em uma faixa de operação mais larga ou ...

Motion of Uncharged Particles in Electroosmotic Flow through a Wavy Cylindrical Channel

N. Qudus[1], T. Mahbub[1], S. A. Ali[1], and M. Shajahan[1]
[1] Bangladesh University of Engineering and Technology, Dhaka Bangladesh

A finite element model is employed to describe the electric potential distribution and electroosmotic flow field inside a wavy cylindrical channel. The model uses coupled Laplace and Poisson-Boltzmann to evaluate the electric potential distribution inside the channel. It also contains continuity and Navier–Stokes equations for the solution of fluid flow. A particle trajectory model was ...

COMSOL Multiphysics Modeling of Rotational Resonant MEMS Sensors with Electrothermal Drive

S. Nelson[1], and M. Guvench[1]
[1]University of Southern Maine, Gorham, Maine, USA

COMSOL Multiphysics is employed to model, simulate and predict the performance of a high Q, in-plane rotational resonating MEMS sensor. The resonating sensor disk is driven by thermal expansion and contraction of the support tethers due to AC joule heating. The resonant frequency is sensed by stationary contacts. For cost reduction, the relatively simple, low cost SOIMUMPS fabrication process is ...

Design of Passive Micromixers using the COMSOL Multiphysics software package

M. Itomlenskis, P. Fodor, and M. Kaufman

Physics Department, Cleveland State University, Cleveland, OH, USA

Relief patterning of the surface of microchannels has been actively pursued as a method of promoting mixing in systems with a low Reynold’s number (<<100). In this work, we explore, by using the COMSOL Multiphysics package and its Chemical Engineering Module, the possibility of enhancing the mixing quality of two fluids in a microchannel with a non-periodic fractal pattern of ridges ...