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A Wide Range MEMS Vacuum Gauge Based on Knudsen’s Forces

V. Sista, and E. Bhattarchaya
Microelectronics and MEMS Lab
Department of Electrical Engineering
Indian Institute of technology Madras
Chennai, India

A MEMS based Knudsen’s pressure gauge working in the range of 1e-5 mbar to 10 mbar is designed and simulated in COMSOL. The working principle is based on Knudsen’s forces that arise when two plates are held at different temperatures and their separation is comparable to the mean free path of the ambient gas molecules. The forces change the separation between the plates and capacitance between ...

Modeling of Silicon Piezoresistive Pressure Sensor: Application to Prevent Some Diabetes Complications

F. Kerrour[1], A. Beddiaf[1], M. Benabbas-Marir[1]
[1]MODerNa Laboratory, University Mentouri, Constantine, Algeria

Several analytical solutions describing the mechanical behavior of a silicon micro membrane deflection, perfectly embedded and subjected to a uniform and constant pressure have been proposed. The obtained results are compared with those obtained by using COMSOL software for a rectangular diaphragm deflection. COMSOL Multiphysics is powerful software for solving problems based on partial ...

Simulation of MEMS Based Pressure Sensor for Diagnosing Sleep Disorders

J. Vijitha[1], S. S. Priya[1], K. C. Devi[1]
[1]PSG College of Technology, Coimbatore, Tamil Nadu, India

Sleep apnea is a type of sleep disorder characterized by pauses in breathing or instances of shallow or infrequent breathing during sleep. There is a need to diagnose sleep apnea since it leads to fluctuations in the oxygen level that in turn affect the heart rate and blood pressure. In order to detect this disorder, a Micro Electro Mechanical System (MEMS) based piezoelectric pressure sensor ...

High Coupling Factor Piezoelectric Materials for Bending Actuators: Analytical and Finite Elements Modeling Results

I.A. Ivan[1], M. Rakotondrabe[1], and N. Chaillet[1]
[1]FEMTO-ST Institute, University of Franche-Comte, Besançon, France

New giant piezoelectric factor materials such as PMN-PT and PZN-PT were researched during the last decade and are actually becoming commercially available. As they seem very attractive for actuator designs, we studied their potential in replacing PZT ceramics. In a first comparative approach, we tested a series of classic rectangular composite bimorph structures of different combinations of ...

Mathematical Modeling of Zig-Zag Traveling-Wave Electro-Osmotic Micropumps

J. Hrdlicka[1], P. Cervenka[1], M. Pribyl[1], and D. Snita[1]
[1]Department of Chemical Engineering, Institute of Chemical Technology Prague, Prague, Czech Republic

In this paper we present results of the mathematical modeling of AC electroosmotic micropumps. Unlike others we use the full dynamic description, instead of the linearized model. Skewed hybrid discretization meshes are employed in order to accurately capture the main features of the studied system. Also, we introduce zig-zag electrode arrangements for traveling-wave electroosmotic micropumps. ...

A Study of Lubricating Flows in MEMS Bearings

E. Gutierrez-Miravete[1], and J. Streeter[2]

[1]Department of Engineering and Science, Rensselaer at Hartford, Hartford, Connecticut, USA
[2]Optiwind, Torrington, Connecticut, USA

The bearing and shaft are part of a safe and arm device constructed as an assembly by a multi-layer additive/subtractive plating and planarization processes (EFAB technology). Devices are constructed by a multi-layer additive/subtractive planarization process. This paper evaluates the lubricating flow between the shaft and journal of the MEMS bearing for seven configurations. The pressure ...

Contactless Excitation of MEMS Resonant Sensors by Electromagnetic Driving

M. Baù[1], V. Ferrari[1], and D. Marioli[1]
[1]Department of Electronics for Automation, University of Brescia, Brescia, Italy

A contactless electromagnetic principle for the excitation of mechanical vibrations in resonant structures has been investigated. The principle relies on no specific magnetic property of the resonator except electrical conductivity and can be adopted for employing the structures as resonant sensors for measurements either in environments not compliant with the requirements of active electronics ...

Numerical and Experimental Evaluation for Measurement of a Single Red Blood Cell Deformability Using a Microchannel and Electric Sensors

K. Tatsumi[1]
[1]Kyoto University, Kyoto City, Kyoto, Japan

An electric micro-resistance sensor that can continuously measure the deformability of a single red blood cell (RBC) in a microchannel and a numerical model that can simulate the resistance and capacitance of the cell membrane and cytoplasm are developed and improved. The resistance signal pattern between the electrodes is measured to evaluate the feasibility of the present sensor, using the ...

Effect of Fluid Conditions on Air-Liquid Interface in Hydrophobic Micro Textured Surface

S. Takahashi[1], S. Ogata[1]
[1]Tokyo Metropolitan University Hachioji City, Tokyo, Japan

We studied the influence of a number of gas-liquid interface on the drag reduction effect by numeric simulation. Level set method was used for an analysis of gas-liquid interface. The analytic model is rectangular channel of height h = 5 micrometer and width w = 20 micrometer with two hydrophobic microstructures in bottom of channel. In this channel, we found that the liquid penetrates in the ...

Design and Characterization of MEMS Based Accelerometers for Various Applications - new

R. Singh[1], M. Singh[2]
[1]National Institute of Technology Karnataka, Surathkal, Karnataka, India
[2]Indian Institute of Technology Delhi, New Delhi, Delhi, India

Today, MEMS based accelerometers are used in a variety of applications. To name a few, they are used in safety systems in automobiles, it has added a new dimension to miniaturization of devices, it has replaced traditional piezoelectric accelerometers, which were big and difficult to use. For its various applications, differing bandwidth (operating frequency range) and amplitude of vibration are ...