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Multiphysics System Simulation for MEMS Inertial Sensors

R. Sattler
University of Applied Sciences, Regensburg, Germany

This paper gives an overview of modelling microsensors on geometry and system level. The focus will be on the generation of the multiphysics reduced order system model and the coupling with package and ASIC models. The method is based on modal superposition. This means all the details of the sensor can be considered in a finite element model. The mechanical mode shapes of this model form the ...

Design and Characterization of a MEMS Varactor

V. S. Nagaraja, N. Suma, and S. L. Pinjare
Nitte Meenakshi Institute of Technology

The tunable capacitor (variable capacitor) is one of the most important and components in filters, Phase shifters, VCO etc. A tunable capacitor can also be built using electro – thermal actuating mechanism. Compared to electro static, tunable capacitors actuated by thermal actuators have several advantages like lower driving voltages. The performance of thermal actuator becomes a key factor ...

A Wide Range MEMS Vacuum Gauge Based on Knudsen’s Forces

V. Sista, and E. Bhattarchaya
Microelectronics and MEMS Lab
Department of Electrical Engineering
Indian Institute of technology Madras
Chennai, India

A MEMS based Knudsen’s pressure gauge working in the range of 1e-5 mbar to 10 mbar is designed and simulated in COMSOL. The working principle is based on Knudsen’s forces that arise when two plates are held at different temperatures and their separation is comparable to the mean free path of the ambient gas molecules. The forces change the separation between the plates and capacitance between ...

Mechanical Model of RF MEMS Capacitor Structures

R. Chatim[1]
[1]University of Kassel, Kassel, Germany

In order to design an RF MEMS based device, it is beneficial to have information concerning mechanical behavior. For model verification purpose, solution offered by simulation software equipped with predefined physics application is one valuable way to provide initial reference. To avoid unwanted particular total strain in RF MEMS structures, a compensation layer can be utilized. When the number ...

Simulation of MEMS Based Pressure Sensor for Diagnosing Sleep Disorders

J. Vijitha[1], S. S. Priya[1], K. C. Devi[1]
[1]PSG College of Technology, Coimbatore, Tamil Nadu, India

Sleep apnea is a type of sleep disorder characterized by pauses in breathing or instances of shallow or infrequent breathing during sleep. There is a need to diagnose sleep apnea since it leads to fluctuations in the oxygen level that in turn affect the heart rate and blood pressure. In order to detect this disorder, a Micro Electro Mechanical System (MEMS) based piezoelectric pressure sensor ...

Modelling of SiC Chemical Vapour Infiltration Process Assisted by Microwave Heating

G. Maizza[1] and M. Longhin[1]
[1]Dipartimento di Scienza dei Materiali ed Ingegneria Chimica, Politecnico di Torino, Torino, Italy

The excessive presence of residual SiC matrix inter-fiber pores is often the main cause for the very poor mechanical strength and toughness of SiC/SiC composites manufactured by CVI (Chemical Vapour Infiltration) process. This work presents a micro/macro Microwaveassisted Chemical Vapour Infiltration (MW-CVI) model as a strategy to attack the problems above. The proposed model couples a reactor ...

A Study of Lubricating Flows in MEMS Bearings

E. Gutierrez-Miravete[1], and J. Streeter[2]

[1]Department of Engineering and Science, Rensselaer at Hartford, Hartford, Connecticut, USA
[2]Optiwind, Torrington, Connecticut, USA

The bearing and shaft are part of a safe and arm device constructed as an assembly by a multi-layer additive/subtractive plating and planarization processes (EFAB technology). Devices are constructed by a multi-layer additive/subtractive planarization process. This paper evaluates the lubricating flow between the shaft and journal of the MEMS bearing for seven configurations. The pressure ...

Contactless Excitation of MEMS Resonant Sensors by Electromagnetic Driving

M. Baù[1], V. Ferrari[1], and D. Marioli[1]
[1]Department of Electronics for Automation, University of Brescia, Brescia, Italy

A contactless electromagnetic principle for the excitation of mechanical vibrations in resonant structures has been investigated. The principle relies on no specific magnetic property of the resonator except electrical conductivity and can be adopted for employing the structures as resonant sensors for measurements either in environments not compliant with the requirements of active electronics ...

COMSOL Multiphysics Modeling of Rotational Resonant MEMS Sensors with Electrothermal Drive

S. Nelson[1], and M. Guvench[1]
[1]University of Southern Maine, Gorham, Maine, USA

COMSOL Multiphysics is employed to model, simulate and predict the performance of a high Q, in-plane rotational resonating MEMS sensor. The resonating sensor disk is driven by thermal expansion and contraction of the support tethers due to AC joule heating. The resonant frequency is sensed by stationary contacts. For cost reduction, the relatively simple, low cost SOIMUMPS fabrication process is ...

Development and Characterization of High Frequency Bulk Mode Resonators

H. Pakdast, Z. Davis
DTU Nanotech, Technical University of Denmark, Kgs. Lyngby, Denmark

This article describes the development of a bulk mode resonator which can be employed for detection of bio/chemical species in liquids.  The goal is to understand the mechanical and electrical properties of a bulk mode resonator device which exhibit high frequency resonance modes and Q-factor. A high resonance frequency is desirable because a small change in the resonator’s mass, for ...