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MEMS Electrostatic Acoustic Pixel

A. Arevalo [1], D. Conchouso [1], D. Castro [1], I. G. Foulds [2],
[1] Computer, Electrical, & Mathematical Sciences & Engineering, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
[2] The University of British Columbia, School of Engineering, Vancouver, BC, Canada

The growth of the electronics industry demand better components for the electronic systems. Such components need to be improve to keep up with the evolution of the digital era. The loudspeaker design has not been changed for almost a century [1-5]. The acoustic transducer is the last analogue component needed for a true digital audio system. We want to validate the feasibility of using an ...

Design & Simulation of Various Shapes of Cantilever Beam for Piezoelectric Power Generator

P. Graak [1], S. Kaur [1], A. Gupta [1], P. Chhabra [1], D. Kumar [1], A. Shetty [2]
[1] Kurukshetra University, Kurukshetra, Haryana, India
[2] Indian Institute of Science, Bengaluru, Karnataka, India

The ambient vibrations can be of great promise for harvesting energy initially at small scale to use for micro and nano scale devices. Such vibrations converted to electrical energy by piezoelectric transducer due to their major significance. Various research journals have introduced the phenomenon of energy optimization to increase the generated power and used directly for application like ...

Nanowire Based Flexible Piezoelectric Sensor for Structural Health Monitoring Applications

A. El Kacimi [1], E. Pauliac-Vaujour [1], J. Eymery [2]
[1] University Grenoble Alpes, CEA, LETI, MINATEC Campus, Grenoble, France
[2] University Grenoble Alpes, CEA, Grenoble, France

We report on the modeling of flexible piezoelectric capacitive sensor based on GaN wires grown by Metal Organic Vapor Phase Epitaxy. Single crystal cone-shaped wires with hexagonal cross section are embedded within dielectric layers (parylene) in between two metal electrodes to achieve a capacitive structure. The device characteristics directly depend on growth conditions for example by tuning ...

Design of FIDT for 3D Analysis of MEMS Based Gas Sensor Using SAW Technology

V. S. P. Rajesh [1],
[1] St. Mary's Group of Institutions, Hyderabad, India

3D model of MEMS based SAW gas sensor is designed using Focused Inter Digital Transducers design. Surface displacement & Electrical potential are analyzed at resonance & anti-resonance frequencies. Operating frequency is from 8.7 MHz which acts as start band and 9.2 MHz as stop band. FIDT model helps in energy optimization by focusing the propagating wave more on to the poly-chemical coating. ...

2D Simulation of Cardiac Tissue - new

S. Esfahani[1]
[1]University of South Florida, Tampa, FL, USA

A two-dimensional atrial tissue model has been constructed in COMSOL Multiphysics® software to study the propagation of action potential and electrograms. The model presents the atrial electrograms recorded with a mapping catheter. A 2D atrial tissue model is simulated using the Courtemanche et al. cell model equations. PDE in coefficient form was used in COMSOL Multiphysics® to reproduce the ...

Air Damping Simulation of MEMS Torsional Paddle - new

N. Mahmoodi[1], C. J. Anthony[1]
[1]University of Birmingham, Birmingham, UK

Viscous damping has a significant effect on dynamic performance of the resonators operating within fluid. This work is aimed to find the viscous damping for MEMS torsional paddle operating in air. Interaction of moving structure with the fluid requires a complicated and challenging analysis. The Fluid-Structure Interaction interface of COMSOL Multiphysics® software is used to study the 2-D ...

Surface Acoustic Wave Based MEMS Resonator

S. Dixit[1], R. C. Jain[1]
[1]Jaypee Institute of Information Technology, Noida, Uttar Pradesh, India

Surface Acoustic Waves (SAW) is the acoustic wave that propagates along the surface of the substrate with amplitude decaying exponentially away from the surface. A basic SAW device consists of two IDT’s on a piezoelectric substrate such as quartz. Surface Acoustic Wave can be generated by application of a voltage to an IDT deposited on the surface of a piezoelectric substrate. The ...

Primary Current Distribution Model for Electrochemical Etching of Silicon through a Circular Opening

A. Ivanov [1], U. Mescheder [1],
[1] Hochschule Furtwangen University, Furtwangen im Schwarzwald, Germany

Primary current distribution model for anodization of low-doped p-type silicon through a circular opening in frontside insulating mask is developed. The model is applied in two regimes of the process – pore formation and electropolishing – by definition of current density dependent functions of porosity and dissolution valence based on experimental results. As found also experimentally, ...

Design and Simulation of Underwater Acoustic MEMS sensor

S. Prabhu [1], Nagbhushan [1],
[1] Nitte Meenakshi Institute of Technology, Bengaluru, Karnataka, India

Silicon based MEMS have wide applications in under water sensors. This work aims one such applications, hydrophone. Hydrophone detects the pressure variations of acoustic signals and noise in the water and produces an output voltage proportional to the pressure. Here the attempt is made to design and simulate MEMS based underwater acoustic sensor whose working is based on piezoresistive physics. ...

Multiphysics Simulation of a Self-heating Paraffin Membrane Microactuator

P. Lazarou[1], C. Rotinat[1]
[1]CEA LIST/DIASI/LRI, Paris, France

A grand variety of microactuator technologies and demonstrators has been introduced during the last years. Of particular interest are the microactuators based on phase change materials and especially paraffin wax, which can volumetrically expand up to 15%, providing high force actuation. The object of this study is the numerical validation of a paraffin microactuator concept by coupling multiple ...