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MEMS Resonator for RF Applications

V. Harshey
Visvesvaraya National Institute of Technology
Nagpur
Maharashtra, India

Vibrating mechanical tank components, such as quartz crystals and surface acoustic wave (SAW) resonators with Q’s in the range of 10e3–10e6, are widely used to implement high-Q oscillators and band pass filters in the radio frequency (RF) and intermediate frequency (IF) stages of communication transceivers. This paper will discuss designing of resonator and effects of various parameter on the ...

Calculation of Surface Acoustic Waves on a Piezoelectric Substrate using Amazon™ Cloud Computing

U. Vogel [1], M. Spindler [1], S. Wege [1], T. Gemming [1]
[1] Leibniz Institute for Solid State and Materials, Dresden, Germany

In this work, we seek to simulate SAWs for a better understanding and to benchmark the currently available cloud computing possibilities of COMSOL Multiphysics® software. By using the MEMS module we demonstrate 3D models with reduced geometry to achieve principle information about the wavefield. For a benchmark, a high-speed workstation with limited memory (RAM) is compared to the most potent ...

Sensitivity Optimization of Microfluidic Capacitance Sensors

S. Satti[1], M. Baghini[1]
[1]Indian Institute of Technology Bombay, Mumbai, Maharashtra, India

As a part of a lab-on-chip-device, more often it is required to measure dielectric constant of the fluid. For this purpose it is necessary to develop a sensor whose size is compatible with microfluidic channel. The work, presented in this paper, studies effect of the parameters influencing sensitivity of such a sensor and ultimately optimizes these dimensions to maximize the sensitivity. We ...

FSI Analysis of Microcantilevers Vibrating in Fluid Environment

A. Ricci[1] and E. Giuri[1]

[1]Materials and Microsystems Laboratory (CHI-Lab), Politecnico di Torino, Torino, Italy

Cantilever vibration in fluid environment is probably one of the most common Fluid Structure Interaction problems in the field of Micro/Nano Electro Mechanical Systems. Usually the effect of fluid on cantilever oscillation is characterized in terms of mode resonance frequencies and quality factors (Qs). In this work a new approach to the above FSI problem is proposed: modes Q factors and ...

Dynamic Characterization and Mechanical Simulation of Cantilevers for Electromechanical Vibration Energy Harvesting

N. Alcheick[1], H. Nesser[1], H. Debeda[1], C. Ayela[1], I. Dufour [1]
[1]Univ. Bordeaux, IMS Lab, Pessac, France

Energy harvesting from ambient vibrations has become an interesting topic for powering wireless sensor networks. Resonant microdevices based on MEMS have become of central importance at low frequency. The power produced at resonance is at least one order of magnitude larger than off frequency power since the largest strain is obtained at resonance. In order to obtain large strain for efficient ...

MEMS Pirani Sensor for Pressure Measurements in the Fine- and High-Vacuum Range - new

M. Grau[1], F. Völklein[1], A. Meier[1], C. Kunz[1], P. Woias[2]
[1]RheinMain University of Applied Sciences, Institute for Microtechnologies, Rüsselsheim, Germany
[2]University of Freiburg, Department of Microsystems Engineering, Freiburg, Germany

A high performance MEMS Pirani sensor (VAC_03) was designed and optimized based on analytics. Due to the fact that this MEMS Pirani sensor is a 3D-Object, the calculation of the thermal radiation by analytics is limited. As the radiation behavior in the system is, beside the solid thermal conductance, responsible for the low-pressure detection limit of such vacuum gauges, we switched to a FEM ...

Metal MEMS Membrane Based Electric Field Sensor

E. Tahmasebian[1], C. Shafai[1], T. Chen[1]
[1]University of Manitoba, Winnipeg, MB, Canada

A MEMS based electrostatic field sensor is presented which uses capacitive interrogation of an electrostatic force deflected microstructure. The deflection of the sensor is calculated both by simulation and theoretical model and it has been shown that the results of the simulations have acceptable values compared to the theoretical ones. Simulation models have also been designed to solve the ...

Optimization of MEMS Based Capacitive Accelerometer for Fully Implantable Hearing Aid Application

A. Dwivedi [1], G. Khanna [1],
[1] NIT Hamirpur, Hamirpur, Himachal Pradesh, India

This work describes the design and optimization of three prototypes of microelectromechanical systems (MEMS) capacitive accelerometer-based middle ear microphone. The microphone is intended for middle ear hearing aids as well as future fully implantable cochlear prosthesis. The analysis is done using COMSOL Multiphysics®. The maximum applied acceleration was considered 1g. Human temporal bones ...

Design and Simulation of Underwater Acoustic MEMS sensor

S. Prabhu [1], Nagbhushan [1],
[1] Nitte Meenakshi Institute of Technology, Bengaluru, Karnataka, India

Silicon based MEMS have wide applications in under water sensors. This work aims one such applications, hydrophone. Hydrophone detects the pressure variations of acoustic signals and noise in the water and produces an output voltage proportional to the pressure. Here the attempt is made to design and simulate MEMS based underwater acoustic sensor whose working is based on piezoresistive physics. ...

MEMS Electrostatic Acoustic Pixel

A. Arevalo [1], D. Conchouso [1], D. Castro [1], I. G. Foulds [2],
[1] Computer, Electrical, & Mathematical Sciences & Engineering, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
[2] The University of British Columbia, School of Engineering, Vancouver, BC, Canada

The growth of the electronics industry demand better components for the electronic systems. Such components need to be improve to keep up with the evolution of the digital era. The loudspeaker design has not been changed for almost a century [1-5]. The acoustic transducer is the last analogue component needed for a true digital audio system. We want to validate the feasibility of using an ...