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COMSOL News Magazine 2017

MEMS Based Silicon Load Cell for Weighing Applications

D. Chauhan[1], B. D. Pant[2]
[1]Kurukshetra University, Kurukshetra, Haryana, India
[2]CSIR- Central Electronics Engineering Research Institute, Pilani, Rajasthan, India

Load cells are force sensors, which are used in weighing equipment. The objective of this work is to develop MEMS based load cell. In this work two different load cell designs were simulated. First design is based on compressing a meander like polysilicon strain gage for the measurement of high forces up to 10kN. Second design is based on MEMS pressure sensor consisting of membrane, on which ...

Design and Simulation of 3D MEMS Piezoelectric Gyroscope using COMSOL Multiphysics®

T.Madhuranath[1], R.Praharsha[1], Dr.K.Srinivasa Rao[1]
[1]Lakireddy Bali Reddy College of Engineering, Mylavaram, Andhra Pradesh, India

MEMS is the leading technology which combines both electronic and mechanical devices on a single microchip. Tracing the position of the object is an important problem in engineering. This can be addressed by Gyroscopes. These sensors are used to find orientation and angular velocity. This paper focuses on 3D MEMS Piezoelectric Gyroscope. COMSOL Multiphysics® is used for designing and ...

Design of FIDT for 3D Analysis of MEMS Based Gas Sensor Using SAW Technology

V. S. P. Rajesh [1],
[1] St. Mary's Group of Institutions, Hyderabad, India

3D model of MEMS based SAW gas sensor is designed using Focused Inter Digital Transducers design. Surface displacement & Electrical potential are analyzed at resonance & anti-resonance frequencies. Operating frequency is from 8.7 MHz which acts as start band and 9.2 MHz as stop band. FIDT model helps in energy optimization by focusing the propagating wave more on to the poly-chemical coating. ...

Design and Analysis of Micro-Heaters for Temperature Optimization using COMSOL Multiphysics for MEMS Based Gas Sensor

V. S. Selvakumar[1], L. Sujatha[1]
[1]Rajalakhmi Engineering College, Chennai, Tamil Nadu, India

Micro-Heaters are the key components in sub-miniature micro-sensors, especially in gas sensors. The metal oxide gas sensors utilize the properties of surface adsorption to detect changes in resistance as a function of varying concentration of different gases [5]. To detect the resistive changes, the heater temperature must be in the requisite temperature range over the heater area. Hence the ...

Simulation of the Impedance Response of Thin Films as a Function of Film Conductivity and Thickness

Y. Jin [1], S. Kumar [1], R. A. Gerhardt [1],
[1] School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, GA, USA

1. Introduction The electrical properties of materials are important in many different applications. In microelectronics for example, films must perform as insulators, semiconductor or as conducting layers. In recent years, scanning probe methods are being extended to the nanometre scale range since accurate high spatial resolution measurements of electrical properties are of great interest ...

Nanoscale Heat Transfer using Phonon Boltzmann Transport Equation

S. Sihn[1,2], and A.K. Roy[2]

[1]Air Force Research Laboratory, Wright-Patterson Air Force Base, Dayton, Ohio, USA
[2]University of Dayton Research Institute, Dayton, Ohio, USA

COMSOL Multiphysics was used to solve a phonon Boltzmann transport equation (BTE) for nanoscale heat transport problems. One dimensional steady-state and transient BTE problems were successfully solved based on finite element and discrete ordinate methods for spatial and angular discretizations, respectively, by utilizing the built-in feature of the COMSOL, Coefficient Form of PDE.

Design and Simulation of MEMS Micro Heater for DNA Amplification

D. Sharma [1], A. Siddiqua [1],
[1] Nitte Meenakshi Institute of Technology, Bengaluru, Karnataka, India

PCR (Polymerase Chain Reaction) is a recent well researched technique which can be employed to obtain an amplified DNA (Deoxyribonucleic Acid). A continuous flow polymerase chain reaction with integrated MEMS based design micro heater for DNA amplification is implemented. Temperature zone is obtained by natural heat conduction rather than making use of typical silicon thermal cycler. Inter ...

Simulations of MEMS Based Piezoresistive Accelerometer Designs in COMSOL

N. Bhalla[1], S. Li[2], and D. Chung[1]
[1]Chung Yuan Christian University, Taiwan, (R.O.C)
[2]National Tsing Hua University, Taiwan, (R.O.C)

Different configurations of MEMS based accelerometer has been made and analysed using COMSOL Multiphysics. The designs presented in this paper consist of a square shaped proof mass with flexures supporting it. Different position and varied number of supporting flexures attached to the proof mass makes each configuration distinct. The piezoresistors are placed near the proof mass and frame ends ...

Design and Simulation of Underwater Acoustic MEMS sensor

S. Prabhu [1], Nagbhushan [1],
[1] Nitte Meenakshi Institute of Technology, Bengaluru, Karnataka, India

Silicon based MEMS have wide applications in under water sensors. This work aims one such applications, hydrophone. Hydrophone detects the pressure variations of acoustic signals and noise in the water and produces an output voltage proportional to the pressure. Here the attempt is made to design and simulate MEMS based underwater acoustic sensor whose working is based on piezoresistive physics. ...

Simulation of a Tether Structure for Ultra-stretchable Monolithic Silicon Fabric

A. Arevalo [1], J. Prieto [1], M. M. Hussain [1], I. G. Foulds [2],
[1] Computer, Electrical, & Mathematical Sciences & Engineering, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
[2] The University of British Columbia, School of Engineering, Vancouver, BC, Canada

The role of stretchable electronics systems allows the design of new reconfigurable macro-electronics, that extends a device capability to function as a distributed sensor network which can potentially be used for wearable electronics. At the moment such devices are primarily based on polymeric materials such as PDMS or Polyimide. Nevertheless, silicon has been the predominant material in ...