Application ID: 10185
A scanning electron microscope samples images by scanning a target with a high-energy beam of electrons. The subsequent electron interactions produce signals such as secondary and back-scattered electrons that contain information about the sample surface topography. Electromagnetic lenses are used to focus this electron beam down to a spot about 10 nm wide on the sample surface.
This model requires both the Particle Tracing Module and the AC/DC Module.
This model example illustrates applications of this type that would nominally be built using the following products:AC/DC Module Particle Tracing Module
however, additional products may be required to completely define and model it. Furthermore, this example may also be defined and modeled using components from the following product combinations:
The combination of COMSOL® products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Particular functionality may be common to several products. To determine the right combination of products for your modeling needs, review the Spezifikationstabelle and make use of a free evaluation license. The COMSOL Sales and Support teams are available for answering any questions you may have regarding this.