Solidly Mounted Resonator 2D

Application ID: 101711

A solidly-mounted resonator (SMR) is a piezoelectric MEMS resonator formed on top of an acoustic mirror stack deposited on a thick substrate. This tutorial shows how to simulate an SMR in 2D. In this example, the eigenmodes were computed and the frequency response from 500 to 1200 MHz was analyzed. The computed impedance curve and displacement profile agree reasonably well with the simulation results found in literature.

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