Solidly-Mounted Resonator 3D

Application ID: 102391


A solidly-mounted resonator (SMR) is a piezoelectric MEMS resonator formed on top of an acoustic mirror stack deposited on a thick substrate. This tutorial shows how to simulate an SMR in 3D. In this example, the eigenmodes were computed with varying number of particles attached to the sensor surface for computing the sensitivity, and the corresponding change in frequency response was analyzed. The resonant frequency decreases with more attached particles, and the sensitivity depends on the attachment location relative to the mode shape - both observations are as expected.

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