Charged Particle Tracing in Semiconductor Manufacturing
Particle tracing modeling and simulation is crucial for accurately predicting the motion of ions or electrons in electric or magnetic fields. Even the smallest leakage current can result in a particle that can damage a chip. Such leakage currents can arise from phenomena such as cold field emission or Townsend discharges. Particle tracing can be used to model these effects, leading to a deeper understanding and the optimization of the leakage process.
The Particle Tracing Module, an add-on to COMSOL Multiphysics®, is equipped with specialized functionality for particle tracing models. For instance, the software offers various predefined forces that affect the motion of particles, such as electric, magnetic, gravitational, and collisional forces. Custom-defined expressions can also be incorporated to account for the particles' interactions with other fields. Furthermore, the software contains unique functionality for using bidirectional couplings between fields and particles, specifically for situations where particles impact electromagnetic fields.
This webinar will demonstrate the capabilities of the Particle Tracing Module and showcase how to optimize the use of the module when simulating charged particle tracing.
Register for Charged Particle Tracing in Semiconductor Manufacturing
To register for the event, please create a new account or log into your existing account. You will need a COMSOL Access account to attend Charged Particle Tracing in Semiconductor Manufacturing.
For registration questions or more information contact info-nl@comsol.com.
Webinar Details
Location:
Online
December 16, 2025 | 14:00 CET (UTC+01:00)